Abstract: A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of impurities. The method additionally may include depositing a seed layer over the barrier layer and depositing a conductive layer over the seed layer. The precursor generally includes pentakis(dimethylamido)tantalum having less than about 5 ppm of impurities. The precursor is generated in a canister coupled to a heating element configured to reduce formation of impurities.

Abstract: Embodiments of the present invention provide a process sequence and related hardware for filling a patterned feature on a substrate with a metal, such as copper. The sequence comprises first forming a reliable barrier layer in the patterned feature to prevent diffusion of the metal into the dielectric layer through which the patterned feature is formed. One sequence comprises forming a generally conformal barrier layer over a patterned dielectric, etching the barrier layer at the bottom of the patterned feature, depositing a second barrier layer, and then filling the patterned feature with a metal, such as copper.

Abstract: Embodiments of the present invention are directed to an apparatus for generating a precursor for a semiconductor processing system (320). The apparatus includes a canister (300) having a sidewall (402), a top portion and a bottom portion. The canister (300) defines an interior volume (438) having an upper region (418) and a lower region (434). In one embodiment, the apparatus further includes a heater (430) partially surrounding the canister (300). The heater (430) creates a temperature gradient between the upper region (418) and the lower region (434). Also claimed is a method of forming a barrier layer from purified pentakis(dimethylamido)tantalum, for example a tantalum nitride barrier layer by atomic layer deposition.

Abstract: Embodiments of an apparatus for generating a chemical precursor used in a vapor deposition processing system are provide which include a canister having a sidewall, a top, and a bottom forming an interior volume which is in fluid communication with an inlet port and an outlet port. The canister contains a plurality of baffles that extend from the bottom to an upper portion of the interior volume and form an extended mean flow path between the inlet port and the outlet port. In one embodiment, the baffles are contained on a prefabricated insert positioned on the bottom of the canister. In one example, an inlet tube may extend from the inlet port into the interior region and be positioned substantially parallel to the baffles. An outlet end of the inlet tube may be adapted to direct a gas flow away from the outlet port, such as towards the sidewall or top of the canister.

Abstract: A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of impurities. The method additionally may include depositing a seed layer over the barrier layer and depositing a conductive layer over the seed layer. The precursor generally includes pentakis(dimethylamido)tantalum having less than about 5 ppm of impurities. The precursor is generated in a canister coupled to a heating element configured to reduce formation of impurities.

Abstract: A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The method additionally may include depositing a seed layer over the barrier layer and depositing a conductive layer over the seed layer. The precursor generally includes pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The precursor is generated in a canister having a surrounding heating element configured to reduce formation of impurities.

Abstract: A precursor and method for filling a feature in a substrate. The method generally includes depositing a barrier layer, the barrier layer being formed from pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The method additionally may include depositing a seed layer over the barrier layer and depositing a conductive layer over the seed layer. The precursor generally includes pentakis(dimethylamido)tantalum having less than about 5 ppm of chlorine. The precursor is generated in a canister having a surrounding heating element configured to reduce formation of impurities.

Abstract: A power control device for a pressing iron includes a position sensor that has a casing, an optical coupler and a shielding plate. The optical coupler is mounted in a lower part of the casing, and has a photoemitter and a photoreceiver that faces the photoemitter and that forms a clearance therewith. The shielding plate is received in the casing, and has an upper plate portion pivoted to an upper part of the casing, and a lower plate portion that extends into the clearance of the optical coupler. The lower plate portion is formed with a notch to permit light transmission between the photoemitter and the photoreceiver when the pressing iron is in an ironing position. The shielding plate pivots by virtue of gravity such that the notch is moved out of alignment with the photoemitter and the photoreceiver, and such that the lower plate portion blocks the light transmission between the photoemitter and the photoreceiver when the pressing iron is in a resting position.

Abstract: An automatic cooker is capable of cooking food according to automatic cooking data stored in a control card. The automatic cooker includes a cooking container for receiving raw food therein, a cooking implement assembly for performing at least one cooking operation on the food in the cooking container, a housing formed with a card slot for insertion of the control card, and a card-type controller mounted in the housing and connected to the cooking implement assembly. The controller receives removably the control card that is inserted from an exterior of the housing via the card slot, and reads the automatic cooking data stored in the control card so as to control operation of the cooking implement assembly in accordance with the automatic cooking data read from the control card in order to cook the food in the cooking container.

Abstract: An electronic acupuncturer includes a casing having a handle stored with a low-frequency current generator and a head portion for fixing two acupuncturing conductors which are electrically connected with the positive and negative polarities of the current generator, and a heater also powered by the current generator adapted for producing heat auxiliarily thermally treating a patient as acupunctured by the two conductors.