Abstract: A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).

Abstract: In recent years there has been a growing market for more universal analysis instruments. Analysis tools such as AFM1, TEM2 and nanoindentation work in similar environments. It is therefore possible, within limits, to use the same equipment to do all of these analyses. Conducting nanoindentation experiments in a TEM has also the advantage of increased accuracy compared to the tests done today. 1 Atomic Force Microscopy 2 Transmission Electron Microscope This project is focused on design and fabrication of a capacitive force sensor for AFM and/or nanoindentation measurements in a TEM. Nanofactory Instruments, the initiator of this, project, has developed a specimen holder for TEM that can be used for nanoindentation experiments. The measurement system used today has its limitations of being to large to be mounted in a TEM and thus an improved model was desired.