Patents by Inventor Jens Krümberg

Jens Krümberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10845718
    Abstract: A holder for receiving and for protecting one side of a photomask or a photomask with pellicle from a cleaning medium, a method for cleaning such a photomask and an apparatus for opening and closing a holder are disclosed. The holder comprises a base having at least three support elements, which are arranged for receiving and for holding the photomask or the photomask with pellicle spaced from the bottom surface of the base, a sealing frame having an upper side and a lower side, wherein the lower side may be seated onto the base, and wherein the sealing frame comprises a centre opening, which is sized such that it may receive the photomask in a spaced manner.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: November 24, 2020
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
    Inventors: Jens Krümberg, Adem Beser, Uwe Dietze
  • Publication number: 20190369510
    Abstract: A holder for receiving and for protecting one side of a photomask or a photomask with pellicle from a cleaning medium, a method for cleaning such a photomask and an apparatus for opening and closing a holder are disclosed. The holder comprises a base having at least three support elements, which are arranged for receiving and for holding the photomask or the photomask with pellicle spaced from the bottom surface of the base, a sealing frame having an upper side and a lower side, wherein the lower side may be seated onto the base, and wherein the sealing frame comprises a centre opening, which is sized such that it may receive the photomask in a spaced manner.
    Type: Application
    Filed: November 16, 2017
    Publication date: December 5, 2019
    Inventors: Jens Krümberg, Adem Beser, Uwe Dietze
  • Publication number: 20140051199
    Abstract: Method for producing a silicon solar cell which is smoothly etched on one side, in which a front side and a rear side of a silicon substrate are etched (10) to form a smooth texture, a dielectric coating is then formed (14, 16) on the rear side of the silicon substrate and the front side of the silicon substrate is subsequently textured (20) by means of a texture etching medium, the dielectric coating formed on the rear side of the silicon substrate being used as an etching mask against the texture etching medium.
    Type: Application
    Filed: December 9, 2011
    Publication date: February 20, 2014
    Inventors: Adolf Muenzer, Andreas Teppe, Jan Schoene, Mathias Hein, Jens Kruemberg, Sandra Kruemberg
  • Publication number: 20110260097
    Abstract: A product is obtained by mixing at least one polyethylene glycol with a base, allowing the mixture to rest in ambient air and at a temperature of approximately 25 degrees Celsius to form two phases, and separating the less dense phase representing the product. The product is used as an additive to etching solutions.
    Type: Application
    Filed: November 5, 2009
    Publication date: October 27, 2011
    Applicant: GP SOLAR GMBH
    Inventors: Ihor Melnyk, Jens Kruemberg, Michael Schmidt, Michael Michel
  • Publication number: 20110186116
    Abstract: Method for producing solar cells with a two-stage doping (9, 11) comprising the method steps of heavy doping (50) of at least a part of the solar cell substrate (1), of at least temporarily protecting doped areas (8), in which heavily doped areas (9) of the two-stage doping (9, 11) should be formed, from an etching medium and etching back (54; 62, 64; 72, 74) unprotected doped areas (17) of the solar cell substrate (1) by means of the etching medium, whereby, for the purpose of protecting the doped areas, sacrificial structures (7) are applied (52) on the areas (8) to be protected, which are at least partly etched (54; 62, 64; 72, 74) during etching back (54; 62, 64; 72, 74) of the unprotected doped areas.
    Type: Application
    Filed: July 27, 2009
    Publication date: August 4, 2011
    Applicant: GP SOLAR GMBH
    Inventors: Jens Kruemberg, Ihor Melnky, Eva-Maria Holbig, Michael Schmidt, Steffen Keller, Peter Fath, Reinhold Schlosser