Abstract: A pump assembly has at least one electronics receiving space (54; 54; 54?). The electronics receiving space (54; 54; 54?) includes at least one defined ventilation opening (40; 40; 40?). The ventilation opening (40; 40; 40?), at an outer side of the electronics receiving space (54; 54; 54?), runs out into an air duct (41; 41; 46; 46; 48, 48?) which is led along at least one condensation surface (60; 60; 60?).

Abstract: A pump assembly has at least one electronics receiving space (54; 54; 54?). The electronics receiving space (54; 54; 54?) includes at least one defined ventilation opening (40; 40; 40?). The ventilation opening (40; 40; 40?), at an outer side of the electronics receiving space (54; 54; 54?), runs out into an air duct (41; 41; 46; 46; 48, 48?) which is led along at least one condensation surface (60; 60; 60?).

Abstract: A method produces electronic components in particular electronic sensors for pressure and differential pressure measurement. Firstly, the semiconductor structure of the electronic components is produced on a wafer. An insulating oxide layer is then applied. A protective metal layer is subsequently applied. The metal layer is applied in sections only in those regions of the wafer in which no splitting, for example by mechanical separation, occurs later. The electronic components thus formed in the wafer are then divided up into individual elements.

Abstract: A pressure sensor is provided with a carrier (2), which in an inner region includes a membrane (4) on which at least one first measurement element (R1?) for detecting a pressure impingement of the membrane (4) is arranged. Additionally, at least one second measurement element (R3?) for detecting a pressure impingement of the membrane (4) is arranged on the membrane. The first measurement element (R1?) and the second measurement element (R3?) are arranged distanced differently far from the edge of the membrane. The output signals of the first and the second measurement element (R1?, R3?) are evaluated together in a manner such that the two measurement elements (R1?, R3?) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).

Abstract: A pressure sensor is provided with a carrier (2), which in an inner region includes a membrane (4) on which at least one first measurement element (R1?) for detecting a pressure impingement of the membrane (4) is arranged. Additionally, at least one second measurement element (R3?) for detecting a pressure impingement of the membrane (4) is arranged on the membrane. The first measurement element (R1?) and the second measurement element (R3?) are arranged distanced differently far from the edge of the membrane. The output signals of the first and the second measurement element (R1?, R3?) are evaluated together in a manner such that the two measurement elements (R1?, R3?) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).

Abstract: The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R1?) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R3?) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R1?) and the second measurement element (R3?) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R1?, R3?) are evaluated together in a manner such that the two measurement elements (R1?, R3?) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).

Abstract: A method produces electronic components in particular electronic sensors for pressure and differential pressure measurement. Firstly, the semiconductor structure of the electronic components is produced on a wafer. An insulating oxide layer is then applied. A protective metal layer is subsequently applied. The metal layer is applied in sections only in those regions of the wafer in which no splitting, for example by mechanical separation, occurs later. The electronic components thus formed in the wafer are then divided up into individual elements.

Abstract: The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R1?) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R3?) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R1?) and the second measurement element (R3?) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R1?, R3?) are evaluated together in a manner such that the two measurement elements (R1?, R3?) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).

Abstract: This invention relates to a pressure sensor comprising a diaphragm and at least one measuring element, which is situated on the diaphragm while serving to measure a deflection of the diaphragm. A holding element is placed on at least one surface of the diaphragm in order to accommodate a seal element, whereby this holding element has a through hole, which faces the diaphragm surface while having a cross-section that corresponds to the outer contour of a seal element to be accommodated.

Abstract: A flow sensor is provided with an obstruction (8) projecting into a flow and at least one measuring probe (10) for measuring a vortex produced by the obstruction (8). The measuring probe (10) includes at least one membrane (12) and a measuring element arranged directly on the membrane (12), for detecting the membrane deflection.

Abstract: The differential pressure sensor is formed of a semiconductor substrate (1) which is thinned out in an inner region into a membrane (2) which may be impinged by pressure on both sides. Measurement resistances (3a to 3d) for detecting the differential pressure (P1 minus P2) are formed within the membrane (2), and compensation resistances (4) are formed on the carrier, which are connected to measurement resistances (3). The measurement resistances (3) are connected into a first measurement bridge (6) and the compensation resistances (4a to 4d) into a second measurement bridge (7).

Abstract: A flow sensor is provided with an obstruction (8) projecting into a flow and at least one measuring probe (10) for measuring a vortex produced by the obstruction (8). The measuring probe (10) includes at least one membrane (12) and a measuring element arranged directly on the membrane (12), for detecting the membrane deflection.

Abstract: A flow cell having at least two inlet channels, each connectable with a reservoir and controllable via valves and ending in an inlet chamber is disclosed herein. Each of two ends of the inlet chamber is connected with a discharge channel through at least two outlet channels. Previously supplied fluid remaining in the inlet chamber is displaced into the discharge channel by newly supplied fluid. The at least two outlet channels establish fluid purity in the chamber via rapid fluid transfer.

Abstract: A flow cell (1) has at least two inlet channels (6 to 9), each connectable with a reservoir (10 to 13) and controllable by means of valves (14 to 17) and ending in an inlet chamber (5). Each of the two ends (21, 22) of the inlet chamber (5) is connected with the discharge channel (18) by means of an outlet channel (19, 20). Thus, the old fluid remaining in the chamber is displaced into the discharge channel (18) by the newly supplied fluid. The dead time until the passing of the pure new fluid is short.