Patents by Inventor Jens Spanuth

Jens Spanuth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100103420
    Abstract: A method for the spatially resolved measurement of the birefringence distribution of a cylindrically symmetrical blank (2) made from an optical material transparent to at least one wavelength ?B between 180 nm and 650 nm, in particular at 193 nm, including: irradiating the blank (2), arranged in a container (4) with an immersion fluid (5), at a jacket-side measurement position (MP) using a measuring light beam (9) which runs in a measuring direction (Y) preferably perpendicular to the axis of symmetry (S) of the blank (2), as well as varying the jacket-side measurement position (MP) by moving the measuring light beam (9) and the blank (2) relative to one another in two directions (X, Z) perpendicular to the measuring direction (Y) for the purpose of spatially resolved measurement of the non-axial birefringence distribution of the blank (2).
    Type: Application
    Filed: October 23, 2009
    Publication date: April 29, 2010
    Applicant: Carl Zeiss SMT AG
    Inventors: Ulrich Pahl, Jens Spanuth
  • Patent number: 6667839
    Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.
    Type: Grant
    Filed: December 27, 2001
    Date of Patent: December 23, 2003
    Assignee: Carl Zeiss SMT AG
    Inventors: Jürgen Hartmaier, Dietrich Klaassen, Thure Boehm, Bernhard Wergl, Michael Gerhard, Jens Spanuth, Ralf Kuschnereit, Peter Vogt, Harry Bauer
  • Publication number: 20020108928
    Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.
    Type: Application
    Filed: December 27, 2001
    Publication date: August 15, 2002
    Applicant: Carl Zeiss Semiconductor Manufacturing Technologies, AG
    Inventors: Jurgen Hartmaier, Dietrich Klaassen, Thure Boehm, Bernhard Weigl, Michael Gerhard, Jens Spanuth, Ralf Kuschnereit, Peter Vogt, Harry Bauer