Abstract: A method for the spatially resolved measurement of the birefringence distribution of a cylindrically symmetrical blank (2) made from an optical material transparent to at least one wavelength ?B between 180 nm and 650 nm, in particular at 193 nm, including: irradiating the blank (2), arranged in a container (4) with an immersion fluid (5), at a jacket-side measurement position (MP) using a measuring light beam (9) which runs in a measuring direction (Y) preferably perpendicular to the axis of symmetry (S) of the blank (2), as well as varying the jacket-side measurement position (MP) by moving the measuring light beam (9) and the blank (2) relative to one another in two directions (X, Z) perpendicular to the measuring direction (Y) for the purpose of spatially resolved measurement of the non-axial birefringence distribution of the blank (2).

Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.

Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.