Patents by Inventor Jeon Yang
Jeon Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240145265Abstract: Proposed are a process fluid treatment apparatus capable of decomposing ozone in a process fluid more effectively, and a wafer cleaning apparatus and semiconductor manufacturing equipment including the same. The process fluid treatment apparatus treats the process fluid used for cleaning a wafer in the semiconductor manufacturing equipment, and includes a housing having an inner space configured to contain the process fluid, a spray nozzle configured to spray the process fluid containing ozone into the inner space in the form of mist, and a nozzle heater configured to heat the process fluid passing through the spray nozzle.Type: ApplicationFiled: April 29, 2023Publication date: May 2, 2024Applicant: SEMES CO., LTD.Inventors: Young Seop CHOI, Myung A JEON, Dong Uk LEE, Boo Seok YANG, Bok Kyu LEE
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Publication number: 20240079619Abstract: Disclosed is a fuel cell system. The fuel cell system of the present invention is characterized by a gas-liquid separator for removing foreign substances in air between a stack and an air supply unit. So the present invention can therefore prevent the foreign substances from being supplied to the stack and improve the function and extend the lifetime of the stack.Type: ApplicationFiled: January 24, 2022Publication date: March 7, 2024Inventors: Jung Kun HER, Kyoung Ju KIM, Woong Jeon AHN, Hyoung Mo YANG
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Patent number: 10980890Abstract: Provided herein are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: GrantFiled: August 20, 2019Date of Patent: April 20, 2021Assignee: LegoChem Biosciences, Inc.Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Publication number: 20200069816Abstract: Provided herein are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: ApplicationFiled: August 20, 2019Publication date: March 5, 2020Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Patent number: 10383949Abstract: Provided are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: GrantFiled: June 11, 2018Date of Patent: August 20, 2019Assignee: LegoChem Biosciences, Inc.Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Publication number: 20180353611Abstract: Provided are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: ApplicationFiled: June 11, 2018Publication date: December 13, 2018Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jung Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Patent number: 9993568Abstract: Provided are methods of use of compounds comprising a self-immolative group, which compounds may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: GrantFiled: May 27, 2015Date of Patent: June 12, 2018Assignee: LegoChem Biosciences, Inc.Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Patent number: 9919057Abstract: Provided are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: GrantFiled: September 25, 2015Date of Patent: March 20, 2018Assignee: LegoChem Biosciences, Inc.Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Jeon Yang, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung
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Patent number: 9865474Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.Type: GrantFiled: November 9, 2016Date of Patent: January 9, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Gon-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi
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Publication number: 20170095576Abstract: Provided are methods of use of compounds comprising a self-immolative group, which compounds may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: ApplicationFiled: May 27, 2015Publication date: April 6, 2017Applicant: LEGOCHEM BIOSCIENCES, INC.Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung, Jeon Yang
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Publication number: 20170062235Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.Type: ApplicationFiled: November 9, 2016Publication date: March 2, 2017Inventors: Gon-Jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi
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Patent number: 9520301Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.Type: GrantFiled: August 6, 2015Date of Patent: December 13, 2016Assignee: Samsung Electronics Co., Ltd.Inventors: Go-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sang-heon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi
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Publication number: 20160184451Abstract: Provided are compounds comprising a self-immolative group, and the compounds comprising a self-immolative group according to the present invention may include a protein (for example, an oligopeptide, a polypeptide, an antibody, or the like) having substrate-specificity for a target and an active agent (for example, a drug, a toxin, a ligand, a detection probe, or the like) having a specific function or activity.Type: ApplicationFiled: September 25, 2015Publication date: June 30, 2016Inventors: Yong Zu Kim, Tae Kyo Park, Sung Ho Woo, Sun Young Kim, Jong Un Cho, Doo Hwan Jung, Jeon Yang, Ji Young Min, Hyang Sook Lee, Yun Hee Park, Jeong Hee Ryu, Kyu Man Oh, Yeong Soo Oh, Jeiwook Chae, Ho Young Song, Chul-Woong Chung
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Publication number: 20160111298Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.Type: ApplicationFiled: August 6, 2015Publication date: April 21, 2016Inventors: Go-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sang-heon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi
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Patent number: 8404080Abstract: An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.Type: GrantFiled: May 4, 2006Date of Patent: March 26, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-jean Jeon, Jong-rok Park, Sung-yeup Sa, Hee-jeon Yang, Guen-suk Lee
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Publication number: 20070017446Abstract: An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.Type: ApplicationFiled: May 4, 2006Publication date: January 25, 2007Inventors: Sang-jean Jeon, Jong-rok Park, Sung-yeup Sa, Hee-jeon Yang, Guen-suk Lee
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Publication number: 20050155555Abstract: A semiconductor manufacturing apparatus includes a chamber main body and a dome to form an accommodating space to accommodate a substrate, an antenna provided on the dome to generate a plasma in the accommodating space, and a temperature controller provided on the dome to control a temperature of the dome. The temperature controller includes a heat transfer unit provided on the dome or in the vicinity of the dome and the antenna, a heater provided on the heat transfer unit to heat the dome, a cooler provided between the heat transfer unit and the heater to cool the dome, and an adjusting valve connected to the cooler to adjust the quantity of coolant supplied to the cooler to control the temperature of the dome within a predetermined reference temperature range. The temperature of the dome may be maintained constant within the predetermined reference temperature range if an electrical power with a high voltage is supplied to the antennato generate the plasma with a high density in the chamber.Type: ApplicationFiled: December 23, 2004Publication date: July 21, 2005Inventors: Kyu-hee Han, Ju-hyun Lee, Hee-jeon Yang, Ki-hyun Kim
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Publication number: 20050027481Abstract: A process control method managing a semiconductor device manufacturing process, including an operation of a system with a plurality of sub-modules, including diagnosing an operational state of the plurality of sub-modules prior to beginning the semiconductor device manufacturing process, checking a process condition of the system, and informing operational states of the sub-modules and the process condition of the system to a user. With this configuration, a system for making semiconductor devices and processing control thereof prevents a malfunction of the semiconductor device manufacturing system according to a diagnosis of the semiconductor device manufacturing system prior to starting a semiconductor manufacturing process, thereby increasing yield in manufacturing semiconductor devices.Type: ApplicationFiled: April 14, 2004Publication date: February 3, 2005Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hee-jeon Yang, Moon-hyeong Han, Hae-yong Jung