Abstract: There is provided an array of M.times.N thin film actuated mirrors for use in an optical projection system comprising an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.N mirrors for reflecting light beams, each of the mirrors being placed on top of each of the actuating structures.

Abstract: There is provided an array of M.times.N thin film actuated mirrors for use in an optical projection system comprising an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.N mirrors for reflecting light beams, each of the mirrors being placed on top of each of the actuating structures.

Abstract: An array of thin film actuated mirrors for use in an optical projection system is disclosed. The array includes: a substrate including an array of connecting terminals; an array of actuating structures, each of the actuating structures being provided with 4P+1 number of actuating parts and a light reflecting part, and further including a plurality of dividing slots, wherein odd numbered actuating parts deform in response to an electrical signal, and even numbered actuating parts tilt while remaining planar; and an array of pairs of supporting members, each of the supporting members in each pair being, respectively, located below the first and the (4P+1)th actuating parts in each of the actuating structures, thereby cantilevering the corresponding actuating structure in place. In the inventive array, the light reflecting part in each of the actuating structures, which is connected to the (2P+1)th actuating part, tilts at a larger angle, increasing the tilting efficiency of the array.

Abstract: An array of M.times.N electrostrictive actuated mirrors for use in an optical projection system is prepared by using a relatively thick (100-150 .mu.m) electrostrictive ceramic wafer whose mechanical properties remain intact, which in turn facilitates the manufacturing process, comprising the steps of: (a) preparing a ceramic wafer made of an electrostrictive material, having top and bottom surfaces; (b) providing on the top surface of the ceramic wafer M vertically oriented first trenches; (c) filling the M trenches with an electrically conductive material; (d) providing N-1 horizontally oriented grooves; (e) covering the top surface, including the N-1 grooves thereon, with a layer of a dielectric material; (f) mounting the ceramic wafer on an active matrix; (g) providing a metallic layer on the bottom surface of the ceramic wafer; (h) forming a photoresistive layer on top of the metallic layer; (i) forming on the ceramic wafer N-1 horizontally oriented cuts, thereby forming an array of M.times.

Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, an array of M.times.N spacer members, each of the spacer members being mounted on the top surface of each of the actuating structures at the distal end thereof, and an array of M.times.N mirror layers for reflecting light beams, each of the mirror layers being secured on each of the spacer members of the actuating structures.

Abstract: An array of thin film actuated mirrors includes an active matrix and an array of actuating structures, each of the actuating structures including an elastic member, a pair of conduits, a second thin film electrode with a stripe, a thin film electrodisplacive member and a first thin film electrode.

Abstract: An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing two identical ceramic wafers; (b) forming M identical trenches thereon; (c) interlocking and bonding together to form a ceramic block; (d) forming a composite ceramic structure from the ceramic block by polishing the top and bottom surfaces thereof; (e) providing M.times.N signal electrodes and M+1 bias electrodes; (f) mounting on an active matrix to thereby form an array of M.times.N actuators; (g) placing M+1 photoresistive segments; (h) preparing places for attaching platforms, to be formed thereon a light reflecting layer; (i) forming a light reflecting layer; (j) pattering the light reflecting layer, including the platform, into an array of M.times.N mirrors; and (k) removing the M+1 photoresistive segments to thereby form the array of M.times.N electrodisplacive actuated mirrors.

Abstract: An array of M.times.N actuated mirrors comprises an active matrix, an array of M.times.N elastic members, an array of M.times.N pairs of actuating structures and an array of M.times.N mirrors. Each of the elastic members is provided with a distal and a proximal ends, the proximal end including a first and a second tab portions, the first tab and the second tab portions being separated by a retraction therebetween, the distal end including a protrusion. Each of the actuating structures is located on the first and the second tab portions on each of the elastic members, respectively. Each of the mirrors is formed on top of the elastic members. When the pair of actuating structures deform in response to an electrical signal, the first and the second tab portions tilt while the remainder of the elastic member, and, the mirror formed on top thereof, stays planar, thereby allowing all of the mirrors to reflect the light beams.

Abstract: There is provided an array of M.times.N thin film actuated mirrors for use in an optical projection system comprising an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.N mirrors for reflecting light beams, each of the mirrors being placed on top of each of the actuating structures.

Abstract: A method for forming an array of M.times.N thin film actuated mirrors for use in an optical projection system comprises the steps of: (a) forming a sacrificial layer on top of an active matrix; (b) forming an array of M.times.N supporting members on the sacrificial layer; (c) depositing an elastic layer; (d) forming M.times.N conduits; (e) depositing a second thin film layer; (f) forming an electrodisplacive layer; (g) patterning the elastic layer, the second layer and the electrodisplacive layer to form an array of M.times.N semifinished actuated mirror structures; (h) heat treating the array of M.times.N semifinished actuated mirror structures; (i) depositing a first thin film layer on each of the semifinished actuated mirror structures to form an array of M.times.N actuated mirror structures; (j) covering each of the actuated mirror structures with a protection layer; and (k) removing the protection layer and the sacrificial layer to thereby form said array of M.times.N thin film actuated mirrors.

Abstract: An array of M.times.N thin film actuated mirrors comprises a switching matrix, an array of M.times.N pairs of supporting members, and an array of M.times.N actuating structures, wherein the active matrix includes a substrate and a first, a second and a third conduction line patterns printed on top thereof, and each of the actuating structures is provided with a pair of actuators and a pair of gate actuators. With the presence of the gate actuators in each of the actuating structures in conjunction with the first, the second and the third conduction line patterns on the switching matrix, it is possible to eliminate the use of transistors in the array of M.times.N thin film actuated mirrors.

Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system, includes an active matrix, an array of M.times.N actuating structures, an array of M.times.N mirror layers and an array of M.times.N supporting members. Each of the actuating structures includes a first a second and a third identically structured actuating parts, each of the actuating parts having at least a motion-inducing thin film layer, a first and a second electrodes. The first electrode from each of the actuating parts is connected to ground, thereby serving as the bias electrode, and the second electrode thereof functions as the signal electrode. Each of the mirror layers is provided with an odd number of tab portions, each of the tab portions being partially separated from the neighboring tab portions by a dividing slot therebetween.

Abstract: An improved method for manufacturing an array of M.times.N thin film actuated mirrors comprises the steps of: providing a base having a flat top surface; forming sequentially a separation layer, a first thin film layer, and a thin film electrodisplacive layer on the top surface of the base; heat treating the thin film electrodisplacive layer to allow a phase transition to take place; forming sequentially a second thin film layer, a elastic layer, and a thin film sacrificial layer on top of the thin film electrodisplacive layer; forming an array of M.times.N empty slots to the sacrificial layer; forming a supporting layer on top of the sacrificial layer; forming an array of M.times.N conduits, each of the conduits passing through the supporting layer and each of the empty slots to thereby form a multilayer structure; forming an array of M.times.