Patents by Inventor Jeong-Deog KOH

Jeong-Deog KOH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR CLEANING A SUBSTRATE
    Publication number: 20090133722
    Abstract: Provided is an apparatus for cleaning a substrate. The substrate cleaning apparatus includes a spin head for supporting the substrate, a first cleaning unit for cleaning the substrate by a polishing process, and a second cleaning unit for cleaning the substrate by injecting a treating solution. Initially, the polishing pad is in contact with the substrate to polish the substrate and then the polishing pad is removed from contact with the substrate so that the treating solution can be supplied to the substrate to clean the substrate.
    Type: Application
    Filed: October 23, 2008
    Publication date: May 28, 2009
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jeong-Deog KOH, Young-Joo SHIN, In-Seak HWANG