Patents by Inventor Jeong-Ha Cho

Jeong-Ha Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8072149
    Abstract: A dual unbalanced indirectly heated cathode (IHC) ion chamber is disclosed. The cathodes have different surface areas, thereby affecting the amount of heat radiated by each. In the preferred embodiment, one cathode is of the size and dimension typically used for IHC ionization, as traditionally used for hot mode operation. The second cathode, preferably located on the opposite wall of the chamber, is of a smaller size. This smaller cathode is still indirectly heated by a filament, but due to its smaller size, radiates less heat into the source chamber, allowing the ion source to operate in cold mode, thereby preserving the molecular structure of the target molecules. In both modes, the unused cathode is preferably biased so as to be at the same potential as the IHC, thus allowing it to act as a repeller.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: December 6, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jeong-Ha Cho, Bon-Woong Koo, Byung-Yeal Yoon, Yong-Tae Kim, Jeong-Ho Yoon
  • Publication number: 20090243490
    Abstract: A dual unbalanced indirectly heated cathode (IHC) ion chamber is disclosed. The cathodes have different surface areas, thereby affecting the amount of heat radiated by each. In the preferred embodiment, one cathode is of the size and dimension typically used for IHC ionization, as traditionally used for hot mode operation. The second cathode, preferably located on the opposite wall of the chamber, is of a smaller size. This smaller cathode is still indirectly heated by a filament, but due to its smaller size, radiates less heat into the source chamber, allowing the ion source to operate in cold mode, thereby preserving the molecular structure of the target molecules. In both modes, the unused cathode is preferably biased so as to be at the same potential as the IHC, thus allowing it to act as a repeller.
    Type: Application
    Filed: March 31, 2008
    Publication date: October 1, 2009
    Inventors: Jeong-Ha Cho, Bon-Woong Koo, Byung-Yeal Yoon, Yong-Tae Kim, Jeong-Ho Yoon