Abstract: Provides is an ultra-microlight transmission device using secondary electrons according to various embodiments of the present invention for implementing the above-objects. The ultra-microlight transmission device includes a light source module configured to generate light, a housing which includes an interior space and performs spectroscopy and diffuse reflection on light introduced into the interior space, a first filter unit configured to convert the spectroscopic and diffusely reflected light into monochromatic light, and a second filter unit configured to cause diffraction and interference for the converted light.

Abstract: In order to have a wanted exposure pattern, a specific intensity of light should be irradiated for a certain time interval since the exposing degree of the photoresist depends on the intensity of the incident light. The intensity of the light emitted from a light source such as a conventional laser has the Gaussian distribution in space, and the Gaussian distribution is maintained after passing a conventional lens. And the uniform area is limited to a very narrow area since the exposure pattern is changed with the intensity distribution of the light incident to the photoresist.