Abstract: One embodiment of the present disclosure provides an electrolytic copper foil includes a copper layer and has a width direction weight deviation of 5% or less calculated according to Equation 1 below, a tensile strength of 25 kgf/mm2 to 62 kgf/mm2, and a valley depth-to-thickness (VDT) of 3.5 to 66.9 calculated according to Equation 2 below. width direction weight deviation (%)=(standard deviation of weight/arithmetic mean of weight)×100, and??[Equation 1] VDT=[thickness of electrolytic copper foil]/[maximum valley depth of roughness profile(Rv)].

Abstract: The present disclosure relates to an all-solid lithium secondary battery and a preparation method thereof, wherein the all-solid lithium secondary battery includes a positive electrode active material layer, a negative electrode active material layer, and a solid electrolyte layer disposed between the positive electrode active material layer and the negative electrode active material layer, wherein the negative electrode active material layer includes platelet carbon nanofibers (Platelet Carbon Nano Fiber, PCNF) and silver nanoparticles.

Abstract: A monitoring system for manufacturing a semiconductor device comprises a source module, an optical module including a collector collecting and reflecting extreme ultraviolet generated light from the source module, an illumination optical system including a field facet mirror, and a projection optical system transferring the extreme ultraviolet light reflected from a reticle to a substrate. A calculating module calculates a degradation rate of the optical module, and a method comprises respectively generating a reference image profile and an (N)th image profile through the second sensor module by correcting the far field image of the extreme ultraviolet with respect to the intensity of the extreme ultraviolet at a reference time point and an (N)th time point after the reference time point, and calculating the degradation rate of the optical module by using a ratio of the reference image profile and the (N)th image profile by the calculation module.

Abstract: A monitoring unit for measuring, in real time, the power of an EUV beam transmitted to a substrate and a substrate treating apparatus including the monitoring unit. The substrate treating apparatus comprising a source which generates an EUV beam, a scanner which transfers a mask pattern to a substrate by using the EUV beam, and a monitoring unit which comprises a detector for detecting the EUV beam and monitoring the power of the EUV beam in real time, wherein the detector is disposed on a path along which the EUV beam passes through a first mirror assembly provided in the scanner and moves to a reticle on which the mask pattern is formed.

Abstract: The present invention relates to a method of manufacturing a separator-composite electrode having a multilayer-structured inorganic layer and a separator-composite electrode manufactured thereby. The present invention provides a method of manufacturing a separator-composite electrode and a separator-composite electrode using the same, wherein there is no separator substrate by forming an inorganic layer serving as an insulating layer in multiple layers, thereby safety is improved and the capacity of a battery is not reduced compared to a conventional battery.

Abstract: Provided is a separator including a porous substrate and a conductive layer disposed on the porous substrate, wherein the conductive layer includes a carbon nanotube structure including a plurality of single-walled carbon nanotube units bonded to each other side by side, and the carbon nanotube structure has an average diameter of 2 nm to 500 nm. Further provided is a secondary battery including the same.

Abstract: The present disclosure relates to an all-solid lithium secondary battery and a preparation method thereof, wherein the all-solid lithium secondary battery includes a positive electrode active material layer, a negative electrode active material layer, and a solid electrolyte layer disposed between the positive electrode active material layer and the negative electrode active material layer, wherein the negative electrode active material layer includes a carbon structure and silver nanoparticles, the carbon structure includes a structure in which a plurality of graphene sheets are connected to each other, and the plurality of graphene sheets include two or more graphene sheets having different plane directions.

Abstract: The present disclosure relates to an all-solid lithium secondary battery and a preparation method thereof, wherein the all-solid lithium secondary battery includes a positive electrode active material layer, a negative electrode active material layer, and a solid electrolyte layer disposed between the positive electrode active material layer and the negative electrode active material layer, wherein the negative electrode active material layer includes a carbon structure and silver nanoparticles, the carbon structure includes at least one hollow-type particle, and the hollow-type particle includes a hollow and a carbonaceous shell surrounding the hollow.

Abstract: An all-solid lithium secondary battery and a preparation method thereof are proved. The all-solid lithium secondary battery comprises a positive electrode active material layer, a negative electrode active material layer including graphitized platelet carbon nanofibers and silver nanoparticles, and a solid electrolyte layer between the positive electrode active material layer and the negative electrode active material layer.

Abstract: A method for manufacturing a positive electrode for a lithium secondary battery includes i) mixing a lithium transition metal oxide and a carbon-based material having a density of 0.05 g/cc or less in a mechanofusion manner to form a positive electrode active material including a carbon coating layer, ii) dry mixing the positive electrode active material and a binder to form a dry mixture, and iii) applying the dry mixture on a positive electrode current collector. A positive electrode for a lithium secondary battery manufactured by the method is also provided.

Abstract: Provided is a positive electrode active material including a core and a coating layer disposed on the core, wherein the core includes Li1+xMyO2+z, wherein M is at least one element selected from the group consisting of nickel (Ni), cobalt (Co), manganese (Mn), iron (Fe), phosphorus (P), aluminum (Al), magnesium (Mg), calcium (Ca), zirconium (Zr), zinc (Zn), titanium (Ti), ruthenium (Ru), niobium (Nb), tungsten (W), boron (B), silicon (Si), sodium (Na), potassium (K), molybdenum (Mo), and vanadium (V), wherein ?0.2?x?0.2, 0<y?2, and 0?z?2, wherein the coating layer includes carbon-based particles, wherein the carbon-based particles includes a structure in which a plurality of graphene sheets are connected to each other, and wherein a D/G peak ratio of the positive electrode active material is in a range of 0.9 to 1.3 during Raman spectrum measurement.

Abstract: Provided are a method for designing an electrode for a lithium secondary battery comprising measuring the electrical conductivity of an electrode with an alternating current to determine whether an electrical path in the electrode has been appropriately formed, and a method for manufacturing an electrode for a lithium secondary battery comprising the same. According to the present invention, it is possible to determine the content of a conductive agent in the electrode using the same.

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

Abstract: The present invention relates to a method of manufacturing a separator-composite electrode having a multilayer-structured inorganic layer and a separator-composite electrode manufactured thereby. The present invention provides a method of manufacturing a separator-composite electrode and a separator-composite electrode using the same, wherein there is no separator substrate by forming an inorganic layer serving as an insulating layer in multiple layers, thereby safety is improved and the capacity of a battery is not reduced compared to a conventional battery.

Abstract: An extreme ultraviolet light generator includes a collector including a first focus and a second focus, a droplet feeder configured to provide a source droplet toward the first focus of the collector, a laser generator configured to irradiate a laser toward the first focus of the collector, an airflow controller between the first focus and the second focus of the collector, the airflow controller having a ring shape, and the airflow controller including at least one slit, and a first part and a second part hinged to each other, and a control gas feeder configured to provide a control gas towards the at least one slit of the airflow controller.

Abstract: Disclosed herein are a secondary battery configured to be prevented from catching fire or exploding in a critical situation such as overcharging and a method of preventing the secondary battery from catching fire or exploding. Since a separator including a low melting point material is used, a short circuit in the battery occurs when the battery is abnormally heated, and the resistance of an electrode is increased when the temperature of the battery increases to a predetermined temperature or higher. As a result, a positive temperature coefficient (PTC) material is operated at a stable State of Charge (SoC). Consequently, it is possible to prevent the occurrence of a thermal runaway phenomenon of the battery.

Abstract: The present invention relates to a lithium secondary battery including a pre-lithiated carbon-based negative electrode, a positive electrode, a separator, and an inorganic electrolyte represented by the following Formula 1 and a method of preparing the same. LiMX_n(SO2)??[Formula 1] In Formula 1, M is at least one metal selected from an alkali metal, a transition metal, and a post-transition metal, X is a halogen element, and n is an integer of 1 to 4.

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

Abstract: An electrolyte for a secondary battery and a lithium secondary battery including the same are disclosed herein. In some embodiments, an electrolyte includes a first electrolyte solution represented by Formula 1 and a second electrolyte solution represented by Formula 2 M1N1X1-n(SO2)??[Formula 1] M2N2X2-m(SO2)??[Formula 2] wherein M1 and M2 are different from each other and each independently an alkali metal, N1 and N2 are each independently at least one metal selected from the group consisting of an alkali metal, a transition metal, and a post-transition metal, X1 and X2 are each independently a halogen element, and n and m are each independently an integer of 1 to 4.

Abstract: A communication module in a vehicle according to an embodiment of the present invention comprises: a battery unit; a receiving unit for receiving power from the battery unit and operating by a predetermined period in a reception standby state; and a control unit configured to accumulatively calculate an amount of current consumed according to an operation time of the receiving unit, and generate a control message for controlling a turn-off of the communication module or controlling an operation period of the receiving unit when the accumulatively calculated value exceeds a predetermined value.