Patents by Inventor Jeonghoon Oh

Jeonghoon Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite retaining ring
    Patent number: 7186171
    Abstract: A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: March 6, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Jeonghoon Oh, Hung Chih Chen, Thomas B. Brezoczky, Douglas R. McAllister, David Datong Huo
  • Composite retaining ring
    Publication number: 20060240750
    Abstract: A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
    Type: Application
    Filed: April 19, 2006
    Publication date: October 26, 2006
    Inventors: Jeonghoon Oh, Hung Chen, Thomas Brezoczky, Douglas McAllister, David Huo
  • Flexible membrane for multi-chamber carrier head
    Publication number: 20060154580
    Abstract: A flexible membrane for use with a carrier head of a substrate chemical mechanical polishing apparatus has a central portion with an outer surface providing a substrate receiving surface, a perimeter portion for connecting the central portion to a base of the carrier head, and at least one flap extending from an inner surface of the central portion. The flap includes a laterally extending first section and a vertically extending second section connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: December 28, 2005
    Publication date: July 13, 2006
    Inventors: Hung Chen, Jeonghoon Oh, Steven Zuniga
  • Two part retaining ring
    Patent number: 6974371
    Abstract: A retaining ring is made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together. The projections can have a cross section with two outwardly sloped sides.
    Type: Grant
    Filed: April 30, 2003
    Date of Patent: December 13, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Hung Chih Chen, Jeonghoon Oh, Steven M. Zuniga, Robert D. Tolles
  • Multiple zone carrier head with flexible membrane
    Publication number: 20050211377
    Abstract: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
    Type: Application
    Filed: March 26, 2004
    Publication date: September 29, 2005
    Inventors: Hung Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky, Steven Zuniga
  • Retaining ring with shaped surface
    Publication number: 20050191947
    Abstract: A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
    Type: Application
    Filed: November 12, 2004
    Publication date: September 1, 2005
    Inventors: Hung Chen, Steven Zuniga, Charles Garretson, Douglas McAllister, Jian Lin, Stacy Meyer, Sidney Huey, Jeonghoon Oh, Trung Doan, Jeffrey Schmidt, Martin Wohlert, Kerry Hughes, James Wang, Danny Cam Lu, Romain Beau De Lamenie, Venkata Balagani, Aden Allen, Michael Fong
  • Two part retaining ring
    Publication number: 20040219870
    Abstract: A retaining ring is made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together. The projections can have a cross section with two outwardly sloped sides.
    Type: Application
    Filed: April 30, 2003
    Publication date: November 4, 2004
    Inventors: Hung Chih Chen, Jeonghoon Oh, Steven M. Zuniga, Robert D. Tolles