Abstract: A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.

Abstract: An inter-floor transport system includes an aerial vehicle configured to move vertically and horizontally along a passage and a power assembly including a power supply adjacent to the passage and a guide cable extending along the passage and connected to the power supply, where the aerial vehicle is configured to receive power through the guide cable without contacting the guide cable.

Abstract: An apparatus includes an elevator, a plurality of storages, a plurality of first robots and a plurality of second robots. The elevator may elevate a vehicle containing a plurality of semiconductor device carriers to position the vehicle at each of a plurality of process floors. At least one of the plurality of storages may be provided at each of the plurality of process floors to store the plurality of semiconductor device carriers. At least one of the plurality of first robots may be provided at each of the plurality of process floors to transfer the vehicle between the elevator and a respective one of the plurality of process floors. At least one of the second robots may be provided at each of the plurality of process floors to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages.

Abstract: A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.

Abstract: A distribution storage system including a wall protruding from a floor in a vertical direction and extending in a first horizontal direction, a plurality of shelves positioned adjacent to a side of the wall and having a space in which carriers are accommodated, an interface port positioned adjacent to a lowermost shelf among the plurality of shelves, a first rail positioned near a ceiling to face the interface port in the vertical direction and extending in the first horizontal direction, a crane moving along the first rail, and a transfer robot coupled to the crane, driven in the vertical direction, and gripping and releasing the carriers, wherein the plurality of shelves are all arranged on one plane.

Abstract: According to an embodiment, a cassette storage case includes a body defining an internal storage space for a cassette. The body includes a lower body part, and a shield body part extending upward from an upper surface outer region of the lower body part. The shield body part has an opening in an upper portion thereof. A load protruding portion extends outward from an outer bottom surface of the lower body part, and has a shape that corresponds to a shape of the opening.

Abstract: An embodiment of the present disclosure provides an overhead hoist transport system including: a driving rail configured to extend in a first direction; a support rail positioned parallel to the driving rail; and a crane movably connected to the driving rail and the support rail and configured to move along the driving rail and the support rail, wherein the crane includes: a base configured to extend in a second direction perpendicular to the first direction to cross the driving rail and the support rail; a driving wheel connected to the base and configured to move along the driving rail; and a guide wheel connected to the base and pressed toward a contact surface of the support rail to remain in contact with the support rail, the contact surface being a surface in contact with the guide wheel.

Abstract: An article transfer and storage apparatus includes a travel rail that includes a plurality of first rails extending in a first direction and spaced apart from each other in a second direction perpendicular to the first direction and a plurality of second rails extending in the second direction and spaced apart from each other in the first direction, a plurality of power transmission rails disposed above the travel rail, extending in the first direction, and spaced apart from each other in the second direction, a transfer robot that is configured to move on the travel rail in the first direction and the second direction to convey an article, the transfer robot including a battery charged by power provided from the plurality of power transmission rails, and storage shelves disposed below the travel rail.

Abstract: A substrate transfer system and method includes a mobile robot configured to handle a substrate carrier and comprising a power receiver; a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot; at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust a distance between the power feeder and the power receiver; an identification tag disposed on any one of the mobile robot and the mobile robot interface device; a tag reader configured to recognize the identification tag; and a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator and the controller is further configured to control the first and/or second actuator to adjust the distance between the power fe

Abstract: A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.

Abstract: A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.