Abstract: An autonomous driving apparatus and method, in which the autonomous driving apparatus may include a sensor unit configured to detect a surrounding object including a surrounding vehicle around an ego vehicle that autonomously travels, a memory configured to store map information, and a processor configured to control autonomous driving of the ego vehicle based on an expected driving trajectory generated based on the map information stored in the memory.

Abstract: A micro-lens built-in vertical cavity surface emitting laser (VCSEL) includes a substrate and a lower reflector formed on the substrate. An active layer is formed on the lower reflector, generating light by a recombination of electrons and holes. An upper reflector is formed on the active layer including a lower reflectivity than that of the lower reflector. A micro-lens is disposed in a window region through which the laser beam is emitted. A lens layer is formed on the upper reflector with a transparent material transmitting a laser beam; the lens layer includes the micro-lens. An upper electrode is formed above the upper reflector excluding the window region a lower electrode formed underneath the substrate.

Abstract: An optical head for near-field recording and reproduction, and a method of manufacturing the optical head. A vertical cavity surface emitting laser (VCSEL) and a photodetector are formed on a slider, and a lens layer, an optical path control layer and/or a coil member are directly formed over the VCSEL and the photodetector by thin film deposition. Combining the optical system for information recording and reproduction with the slider reduces the size of the optical head compared with an optical head adopting a slider and a large optical system which are separated from each other. As a result, dynamic characteristics of the optical head improve, thereby reducing the time required for searching for a target track. Thus, the optical head is suitable for a micro information recording and reproducing system.

Abstract: A micromirror driver for simultaneously and independently controlling a resonant frequency and an amplitude of a micromirror. A micromirror having a plurality of grooves is supported in rotation by an elastic body. Base electrodes having a comb shape are affixed to the grooves and along an edge of the micromirror. A plurality of driver electrodes also having a comb shape are respectively engaged with the base electrodes in a gear like arrangement to electrostatically interact with the micromirror in response to applied voltages. An amplitude and a frequency of the micromirror are controlled by varying a magnitude or a waveform of one or more electrode voltages or by varying a phase between voltages applied to at least two electrodes. Accordingly, greater driving forces, a larger rotation angle of the micromirror, and independent control of amplitude and resonant frequency of the micromirror are obtained.

Abstract: A micromirror driver for simultaneously and independently controlling a resonant frequency and an amplitude of a micromirror. A micromirror having a plurality of grooves is supported in rotation by an elastic body. Base electrodes having a comb shape are affixed to the grooves and along an edge of the micromirror. A plurality of driver electrodes also having a comb shape are respectively engaged with the base electrodes in a gear like arrangement to electrostatically interact with the micromirror in response to applied voltages. An amplitude and a frequency of the micromirror are controlled by varying a magnitude or a waveform of one or more electrode voltages or by varying a phase between voltages applied to at least two electrodes. Accordingly, greater driving forces, a larger rotation angle of the micromirror, and independent control of amplitude and resonant frequency of the micromirror are obtained.

Abstract: A micro-lens built-in vertical cavity surface emitting laser (VCSEL) includes a substrate and a lower reflector formed on the substrate. An active layer is formed on the lower reflector, generating light by a recombination of electrons and holes. An upper reflector is formed on the active layer including a lower reflectivity than that of the lower reflector. A micro-lens is disposed in a window region through which the laser beam is emitted. A lens layer is formed on the upper reflector with a transparent material transmitting a laser beam; the lens layer includes the micro-lens. An upper electrode is formed above the upper reflector excluding the window region a lower electrode formed underneath the substrate.

Abstract: An optical head for near-field recording and reproduction, and a method of manufacturing the optical head. A vertical cavity surface emitting laser (VCSEL) and a photodetector are formed on a slider, and a lens layer, an optical path control layer and/or a coil member are directly formed over the VCSEL and the photodetector by thin film deposition. Combining the optical system for information recording and reproduction with the slider reduces the size of the optical head compared with an optical head adopting a slider and a large optical system which are separated from each other. As a result, dynamic characteristics of the optical head improve, thereby reducing the time required for searching for a target track. Thus, the optical head is suitable for a micro information recording and reproducing system.

Abstract: A compound semiconductor wet thermal oxidation apparatus includes a chamber unit having an inside tube containing water and supporting a specimen and an outside tube encompassing the inside tube forming a seal, and a heating unit having a furnace for heating the specimen and the water.

Abstract: A hand tremor compensating apparatus for a video camera has a bobbin for supporting and protecting a mirror section. The bobbin has a contact portion with a groove provided therein. A barrel is disposed at an outside of the bobbin. The barrel has a boss in which a post is inserted. The bobbin is slidably mounted on the boss. A rotation restraining section employs a magnetic force to restrain the movement of the bobbin. The magnetic force is an attractive force generated between magnets respectively fixed to the bobbin and the post.