Patents by Inventor Jeongsok Ha

Jeongsok Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of parallel shift operation of multiple reactors
    Patent number: 8911826
    Abstract: A method of parallel shift operation of multiple reactors includes: (i) continuously supplying n gases numbered 1 to n simultaneously to n gas ports via n main gas lines, respectively, at a constant flow rate, wherein one of branch gas lines of each main gas line is in an open state so that the inflow rates of the respective reactors are equal, and the outflow rates of the respective reactors are equal; and (ii) while maintaining the inflow rates and the outflow rates of the respective reactors, simultaneously closing the one of the branch gas lines of each main gas line in the open state and opening another one of the branch gas lines of each main gas line so that different numbered gases are continuously supplied to the respective reactors in parallel without changing the inflow rates and the outflow rates of the reactors.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: December 16, 2014
    Assignee: ASM IP Holding B.V.
    Inventors: Wataru Adachi, Jeongsok Ha
  • Method of Parallel Shift Operation of Multiple Reactors
    Publication number: 20140033978
    Abstract: A method of parallel shift operation of multiple reactors includes: (i) continuously supplying n gases numbered 1 to n simultaneously to n gas ports via n main gas lines, respectively, at a constant flow rate, wherein one of branch gas lines of each main gas line is in an open state so that the inflow rates of the respective reactors are equal, and the outflow rates of the respective reactors are equal; and (ii) while maintaining the inflow rates and the outflow rates of the respective reactors, simultaneously closing the one of the branch gas lines of each main gas line in the open state and opening another one of the branch gas lines of each main gas line so that different numbered gases are continuously supplied to the respective reactors in parallel without changing the inflow rates and the outflow rates of the reactors.
    Type: Application
    Filed: August 2, 2012
    Publication date: February 6, 2014
    Applicant: ASM IP HOLDING B.V.
    Inventors: Wataru Adachi, Jeongsok Ha