Abstract: A process apparatus for processing wasted ozone and drained water simultaneously is disclosed. The apparatus includes a process device, a ozone generator, a drain water tank, a gas/liquid mixing device, a decomposition device and a adsorption device. The ozone generator is coupled to the process device for supplying ozone to the process device. The drain tank at least includes a drain water inlet and a drain water outlet. The gas/liquid mixing device includes a gas inlet, a liquid inlet and a liquid outlet. The liquid inlet is coupled to the drain water outlet of drain water tank; the gas inlet is coupled to the ozone generator. The gas/liquid mixing device is used for dissolving ozone into drain water. The decomposition device is coupled to the gas/liquid mixing device for decomposing the organic carbon in the drain water. The adsorption device is coupled to the decomposition device for adsorbing ions in the drain water.