Patents by Inventor Jeremie James Dalton

Jeremie James Dalton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Surface treatment using iodine plasma to improve metal deposition
    Patent number: 7041596
    Abstract: An excited surfactant species is created by generating plasma discharge in a surfactant precursor gas. A surfactant species typically includes at least one of iodine, led, thin, gallium, and indium. A surface of an integrated circuit substrate is exposed to the excited surfactant species to form a plasma-treated surface. A ruthenium thin film is deposited on the plasma-treated surface using a CVD technique.
    Type: Grant
    Filed: April 8, 2004
    Date of Patent: May 9, 2006
    Assignee: Novellus Systems, Inc.
    Inventors: Jeremie James Dalton, Sanjay Gopinath, Jason M. Blackburn, John Stephen Drewery