Patents by Inventor Jeremy George SMITH

Jeremy George SMITH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12020960
    Abstract: A temperature controller for substrate processing system includes memory that stores a temperature control model that correlates a heat transfer gas pressure and a first temperature of a substrate support to a second temperature of a substrate arranged on the substrate support, a temperature calculation module configured to calculate the second temperature of the substrate using the heat transfer gas pressure, the first temperature of the substrate support, and the temperature control model, and a heat transfer gas control module configured to adjust the heat transfer gas pressure based on the second temperature of the substrate calculated by the temperature calculation module and a desired third temperature of the substrate.
    Type: Grant
    Filed: April 8, 2019
    Date of Patent: June 25, 2024
    Assignee: Lam Research Corporation
    Inventors: Jeremy George Smith, Eric A. Pape
  • Publication number: 20230253193
    Abstract: A substrate support for a substrate processing system includes a baseplate and a spray coat layer arranged on the baseplate. The spray coat layer has a first thickness and a first thermal conductivity. A bond layer is arranged on the spray coat layer. The bond layer has a second thickness and a second thermal conductivity. A ceramic layer is arranged on the bond layer. At least one of the first thickness and the second thickness varies in at least one of a radial direction and an azimuthal direction such that a third thermal conductivity between the ceramic layer and the baseplate varies in the at least one of the radial direction and the azimuthal direction.
    Type: Application
    Filed: November 16, 2021
    Publication date: August 10, 2023
    Inventors: Jeremy George SMITH, Alexander MATYUSHKIN, Eric SAMULON, Keith COMENDANT, Yixuan YU
  • Publication number: 20230178344
    Abstract: A baseplate of a substrate support assembly includes a cavity between an upper region, a lower region, and sidewalls of the baseplate, a plurality of pillars arranged in the cavity between the upper and lower regions, an inlet to supply a liquid to the cavity, and an outlet to vent vapor of the liquid. In another implementation, a baseplate of a substrate support assembly includes a first channel arranged in the baseplate, a second channel arranged above the first channel, a plurality of vertical channels connecting the first channel to the second channel, an inlet to supply a liquid to the first channel, and an outlet to vent vapor of the liquid from the second channel.
    Type: Application
    Filed: May 4, 2021
    Publication date: June 8, 2023
    Inventors: John DREWERY, Kevin FLYNN, Jeremy George SMITH, Tom A. KAMP
  • Publication number: 20220130705
    Abstract: An electrostatic chuck (ESC) is provided. An ESC body is provided.
    Type: Application
    Filed: February 14, 2020
    Publication date: April 28, 2022
    Inventors: Jeremy George SMITH, Oleksandr MIKHNENKO, Slobodan MITROVIC
  • Publication number: 20210292893
    Abstract: A method for coating a component of a plasma processing chamber is provided. An electrolytic oxidation coating is formed over a surface of the component, wherein the electrolytic oxidation coating has a plurality of pores, wherein the electrolytic oxidation coating has a thickness and at least some of the plurality of pores extends through the thickness of the electrolytic oxidation coating. An atomic layer deposition is deposited on the electrolytic oxidation coating. The atomic layer deposition comprises a plurality of cycles, where each cycle comprises flowing a first reactant, wherein the first reactant forms a first reactant layer in the pores of the electrolytic oxidation coating, wherein the first reactant layer extends through the thickness of the electrolytic oxidation coating, stopping the flow of the first reactant, flowing a second reactant, wherein the second reactant reacts with the first reactant layer, and stopping the flow of the second reactant.
    Type: Application
    Filed: July 19, 2019
    Publication date: September 23, 2021
    Inventors: Slobodan MITROVIC, Jeremy George SMITH, Tony Shaleen KAUSHAL, Eric A. PAPE
  • Publication number: 20210143037
    Abstract: A temperature controller for substrate processing system includes memory that stores a temperature control model that correlates a heat transfer gas pressure and a first temperature of a substrate support to a second temperature of a substrate arranged on the substrate support, a temperature calculation module configured to calculate the second temperature of the substrate using the heat transfer gas pressure, the first temperature of the substrate support, and the temperature control model, and a heat transfer gas control module configured to adjust the heat transfer gas pressure based on the second temperature of the substrate calculated by the temperature calculation module and a desired third temperature of the substrate.
    Type: Application
    Filed: April 8, 2019
    Publication date: May 13, 2021
    Inventors: Jeremy George SMITH, Eric A. PAPE