Patents by Inventor Jeremy Jerome POOL

Jeremy Jerome POOL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240141482
    Abstract: Nozzles for providing gas into a semiconductor wafer process chamber are disclosed. The nozzles may include a deflector structure that has a surface facing the nozzle outlet so as to redirect gas as it enters a chamber. The nozzles may also have a cooling system to remove heat provided to the deflector structure through the flow of plasma through the nozzle. The deflector structure may be used to distribute the plasma flowed therethrough in a more evenly distributed manner, thereby protecting hardware within the process chamber from potential hotspots. This has the further effect of redirecting gases more efficiently throughout the chamber.
    Type: Application
    Filed: March 17, 2022
    Publication date: May 2, 2024
    Inventor: Jeremy Jerome Pool
  • Patent number: 10944374
    Abstract: An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: March 9, 2021
    Assignee: Lam Research Corporation
    Inventors: Miguel Benjamin Vasquez, Jeremy Jerome Pool, Damien Martin Slevin
  • Publication number: 20200321934
    Abstract: An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.
    Type: Application
    Filed: June 19, 2020
    Publication date: October 8, 2020
    Inventors: Miguel Benjamin VASQUEZ, Jeremy Jerome POOL, Damien Martin SLEVIN
  • Patent number: 10693433
    Abstract: An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: June 23, 2020
    Assignee: Lam Research Corporation
    Inventors: Miguel Benjamin Vasquez, Jeremy Jerome Pool, Damien Martin Slevin
  • Publication number: 20190356295
    Abstract: An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.
    Type: Application
    Filed: May 17, 2018
    Publication date: November 21, 2019
    Inventors: Miguel Benjamin VASQUEZ, Jeremy Jerome POOL, Damien Martin SLEVIN