Patents by Inventor Jeremy L. Dunning

Jeremy L. Dunning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composition comprising silicon carbide
    Patent number: 8153280
    Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: April 10, 2012
    Assignee: Case Western Reserve University
    Inventors: Mehran Mehregany, Christian A. Zorman, Xiao-An Fu, Jeremy L. Dunning
  • Composition Comprising Silicon Carbide
    Publication number: 20110001143
    Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
    Type: Application
    Filed: April 18, 2007
    Publication date: January 6, 2011
    Applicant: FLX MICRO, INC.
    Inventors: Mehran Mehregany, Christian A. Zorman, Xiao-An Fu, Jeremy L. Dunning
  • Silicon carbide and other films and method of deposition
    Patent number: 7261919
    Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
    Type: Grant
    Filed: November 18, 2003
    Date of Patent: August 28, 2007
    Assignee: FLX Micro, Inc.
    Inventors: Mehran Mehregany, Christian A. Zorman, Xiao-An Fu, Jeremy L. Dunning