Abstract: A probe suitable for low-loss microwave frequency operation has a tip assembly including a semi-rigid coaxial cable having a Teflon.TM. dielectric for temperature stability and a freely-suspended end. On this end a semicylindrical recess is formed defining a shelf along which an inner finger and outer pair of fingers are mounted, each made of resilient conductive material, so as to form a coplanar transmission line. Cantilevered portions of the fingers extend past the end of the cable to form an air-dielectric transmission path of uniform and stable characteristic despite exposure to numerous contact cycles and to provide suitable means for probing nonplanar device pads while also offering good visibility of device pads generally.