Abstract: Embodiments relate generally to a traction surface and methods for forming the traction surface. The traction surface may comprise a compound material comprising glass fibers oriented orthogonal to the surface of the compound material extending from the compound material, wherein when the traction surface contacts an icy surface, the glass fibers are operable to penetrate a liquid-like top layer of the icy surface to provide grip with an ice layer below the liquid-like top layer. The method for forming the traction surface may comprise integrating glass fibers into a compound material; orienting the glass fibers within the compound material such that the glass fibers are oriented approximately orthogonal to the surface of the compound material; splitting the compound material to expose the glass fibers, wherein the glass fibers extend from the surface of the compound material; and forming the split compound material into a traction surface.

Abstract: Metrology target design methods and verification targets are provided. Methods include using OCD data related to designed metrology target(s) as an estimation of a discrepancy between a target model and a corresponding actual target on a wafer, and adjusting a metrology target design model to compensate for the estimated discrepancy. The dedicated verification targets may include overlay target features and be size optimized to be measurable by an OCD sensor, to enable compensation for inaccuracies resulting from production process variation. Methods also include modifications to workflows between manufacturers and metrology vendors which provide enabled higher fidelity metrology target design models and ultimately higher accuracy of metrology measurements.

Abstract: Embodiments relate generally to a traction surface and methods for forming the traction surface. The traction surface may comprise a compound material comprising glass fibers oriented orthogonal to the surface of the compound material extending from the compound material, wherein when the traction surface contacts an icy surface, the glass fibers are operable to penetrate a liquid-like top layer of the icy surface to provide grip with an ice layer below the liquid-like top layer. The method for forming the traction surface may comprise integrating glass fibers into a compound material; orienting the glass fibers within the compound material such that the glass fibers are oriented approximately orthogonal to the surface of the compound material; splitting the compound material to expose the glass fibers, wherein the glass fibers extend from the surface of the compound material; and forming the split compound material into a traction surface.

Abstract: Metrology target design methods and verification targets are provided. Methods include using OCD data related to designed metrology target(s) as an estimation of a discrepancy between a target model and a corresponding actual target on a wafer, and adjusting a metrology target design model to compensate for the estimated discrepancy. The dedicated verification targets may include overlay target features and be size optimized to be measureable by an OCD sensor, to enable compensation for inaccuracies resulting from production process variation. Methods also include modifications to workflows between manufacturers and metrology vendors which provide enable higher fidelity metrology target design models and ultimately higher accuracy of metrology measurements.