Patents by Inventor Jeremy T. LUTZ

Jeremy T. LUTZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240411229
    Abstract: Devices, systems, and method for high resolution photolithography can include a mounting stage for receiving a substrate in position to receive projected light for photolithography, a light processing system for projecting light onto the mounting stage for photolithography on the substrate, and a positioning system for adjusting relative positioning between the light processing system and the mounting stage. A control system for conducting operations for high resolution photolithography, can be configured to determine relative positioning between the light processing system and the mounting stage and for governing operation of the positioning system for adjusting relative positioning.
    Type: Application
    Filed: June 6, 2024
    Publication date: December 12, 2024
    Inventors: Andrey IVANKIN, Jared A. MAGOLINE, William O. HUTSON, Jeremy T. LUTZ