Patents by Inventor Jeroen Akker

Jeroen Akker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070097346
    Abstract: An article support configured to support an article to be placed in a beam path of a radiation beam of a lithographic apparatus on the article support is disclosed, the article support having a base plate of a first material and a plurality of burls of a second material, bonded to the base plate of the first material.
    Type: Application
    Filed: October 16, 2006
    Publication date: May 3, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Koen Maria Zaal, Joost Ottens, Jeroen Akker