Patents by Inventor Jeroen Johannes Theodorus Hendrikus DE BEST

Jeroen Johannes Theodorus Hendrikus DE BEST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control system, positioning system, lithographic apparatus and device manufacturing method
    Patent number: 10401743
    Abstract: A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: September 3, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Jeroen Johannes Theodorus Hendrikus De Best, Wilhelmus Henricus Theodorus Maria Aangenent, Stan Henricus Van Der Meulen
  • Control system, positioning system, lithographic apparatus and device manufacturing method
    Patent number: 10365567
    Abstract: A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: July 30, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Jeroen Johannes Theodorus Hendrikus De Best, Wilhelmus Henricus Theodorus Maria Aangenent, Stan Henricus Van Der Meulen
  • Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program
    Patent number: 10095123
    Abstract: A control system for a positioning system, for positioning a driven object, e.g. in a lithographic apparatus, in N dimensions has M sensors, where M>N. A transformation module converts the M measurements by the sensors into a positional estimate in N dimensions taking into account compliance of the driven object.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: October 9, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Jeroen Johannes Theodorus Hendrikus De Best, Jan Van Eijk
  • Sensor, object positioning system, lithographic apparatus and device manufacturing method
    Patent number: 10061213
    Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: August 28, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt, Bo Lenssen, Hendrikus Johannes Schellens, Peter Van Der Krieken, Theodorus Petrus Maria Cadee, Jan Van Eijk, Richard Henricus Adrianus Van Lieshout
  • Sensor, object positioning system, lithographic apparatus and device manufacturing method
    Patent number: 10012914
    Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: July 3, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt, Bo Lenssen, Hendrikus Johannes Schellens, Peter Van Der Krieken, Theodorus Petrus Maria Cadee, Jan Van Eijk, Richard Henricus Adrianus Van Lieshout
  • CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20180164701
    Abstract: A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.
    Type: Application
    Filed: May 19, 2016
    Publication date: June 14, 2018
    Inventors: Jeroen Johannes Theodorus Hendrikus DE BEST, Wilhelmus Henricus Theodorus Maria AAMGEMEMT, Stan Henricus VAN DER MEULEN
  • SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20170277042
    Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
    Type: Application
    Filed: July 20, 2015
    Publication date: September 28, 2017
    Inventors: Johannes Antonius Gerardus AKKERMANS, Ruud Antonius Catharina Maria BEERENS, Sander Christiaan BROERS, Jeroen Johannes Theodorus Hendrikus DE BEST, Adrianus Marinus Wouter HEEREN, George Alois Leonie LEENKNEGT, Bo LENSSEN, Hendrikus Johannes SCHELLENS, Peter VAN DER KRIEKEN, Theodorus Petrus Maria CADEE, Jan VAN EIJK, Richard Henricus Adrianus VAN LIESHOUT
  • CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS, CONTROL METHOD, DEVICE MANUFACTURING METHOD AND CONTROL PROGRAM
    Publication number: 20170212431
    Abstract: A control system for a positioning system, for positioning a driven object, e.g. in a lithographic apparatus, in N dimensions has M sensors, where M>N. A transformation module converts the M measurements by the sensors into a positional estimate in N dimensions taking into account compliance of the driven object.
    Type: Application
    Filed: April 1, 2015
    Publication date: July 27, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Marinus Maria Johannes VAN DE WAL, Wilhelmus Henricus Theodorus Maria AANGENENT, Jeroen Johannes Theodorus Hendrikus DE BEST, Jan VAN EIJK