Patents by Inventor Jeroen Mara Mertens

Jeroen Mara Mertens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20060119817
    Abstract: A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts.
    Type: Application
    Filed: December 8, 2004
    Publication date: June 8, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pieter Maria Hennus, Jeroen Mara Mertens, Patrick Cornelus Hendrik Smulders, Peter Smits