Abstract: An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

Abstract: Position sensor (10) for determining a linear position in a sensing direction, e.g. for application in a vacuum actuator. The position sensor (10) has a first sensor part and a second sensor part moveable with respect to each other. The first sensor part comprises an annular magnet (2) and a magnetic field sensor (3) positioned at a first distance (11) from the annular magnet on the magnet axis (1a). The second sensor part comprises a flux shaper (1) moveable through the annular magnet (2) along the sensing direction between a first and a second position, in the first position the flux shaper being substantially at the first distance (11) from the magnetic field sensor (3). The flux shaper is arranged to influence the magnetic field in a space between the annular magnet (2) and the magnetic field sensor (3).