Patents by Inventor Jeroen Peterus Johannes VAN LIPZIG

Jeroen Peterus Johannes VAN LIPZIG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONDITIONING APPARATUS AND METHOD
    Publication number: 20230400785
    Abstract: There is provided a conditioning system for a lithographic apparatus, said conditioning system being configured to condition one or more optical elements of the lithographic apparatus, wherein the conditioning system is configured to have a sub-atmospheric pressure at the one or more optical elements.
    Type: Application
    Filed: October 14, 2021
    Publication date: December 14, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Antonius Johannus VAN DER NET, Martinus Cornelis Maria VERHAGEN, Johannes Henricus Wilhelmus JACOBS, Laurentius Johannes Adrianus VAN BOKHOVEN, Jeroen Peterus Johannes VAN LIPZIG