Patents by Inventor Jerome Daviot

Jerome Daviot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compositions for cleaning organic and plasma etched residues for semiconductor devices
    Publication number: 20020037820
    Abstract: A composition for the stripping of photoresist and the cleaning of residues from substrates, and for silicon oxide etch, comprising from about 0.01 percent by weight to about 10 percent by weight of one or more fluoride compounds, from about 10 percent by weight to about 95% by weight of a sulfoxide or sulfone solvent, and from about 20 percent by weight to about 50 percent by weight water. The composition may contain corrosion inhibitors, chelating agents, co-solvents, basic amine compounds, surfactants, acids and bases.
    Type: Application
    Filed: July 10, 2001
    Publication date: March 28, 2002
    Applicant: EKC Technology, Inc.
    Inventors: Robert J. Small, Bakul P. Patel, Wai Mun Lee, Douglas Holmes, Jerome Daviot, Chris Reid