Patents by Inventor Jerris H. Peavey

Jerris H. Peavey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetically coupled wafer lift pins
    Patent number: 4790258
    Abstract: An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.
    Type: Grant
    Filed: April 3, 1987
    Date of Patent: December 13, 1988
    Assignee: Tegal Corporation
    Inventors: David J. Drage, Roger B. Lachenbruch, Herbert G. Drake, Jr., Jerris H. Peavey
  • Chrome mask etch
    Patent number: 4774164
    Abstract: Patterning a chrome mask with PBS (polybutenesulfone) photoresist is enabled in a plasma reactor by covering the patterned photoresist with a glass layer, planarizing the glass layer, etching the photoresist and then etching the chrome mask. The pattern transferred to the chrome mask is the negative or inverse of the pattern in the photoresist layer.
    Type: Grant
    Filed: April 6, 1987
    Date of Patent: September 27, 1988
    Assignee: Tegal Corporation
    Inventors: Paula E. Peavey, Jerris H. Peavey