Patents by Inventor Jerry Don HODO

Jerry Don HODO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170045832
    Abstract: Disclosed is a cleaning apparatus configured to clean a radiation transmission assembly (such as a viewport), or part thereof. The radiation transmission assembly provides for radiation transmission to and/or from a low pressure chamber. The cleaning apparatus comprises, a hydrogen radical generator configured to generate hydrogen radicals for use in cleaning said radiation transmission assembly or part thereof, and a connection assembly for connection to said radiation transmission assembly.
    Type: Application
    Filed: April 9, 2015
    Publication date: February 16, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Freek Theodorus MOLKENBOER, Jeremy BURKE, Wilhelm CLAUSSEN, Alexander Franciscus DEUTZ, Jerry Don HODO, Cornelia Elizabeth Carolina HULSBOSCH-DAM, Edwin TE SLIGTE, Mayk VAN DEN HURK