Abstract: Method and apparatus for use in setting up workpiece treatment or processing equipment. A disclosed system processes silicon wafers that are treated during processing steps in producing semiconductor integrated circuits. The processing equipment includes a wafer support that supports a wafer in a treatment region during wafer processing. A housing provides a controlled environment within the housing interior for processing the wafer on the wafer support. A mechanical transfer system transports wafers to and from the support. A wafer simulator is used to simulate wafer movement and includes a pressure sensor for monitoring contact between the simulator and the wafer transfer and support equipment. In one illustrated embodiment the wafer simulator is generally circular and includes three equally spaced pressure sensors for monitoring contact with wafer transport and support equipment.

Abstract: A method and apparatus are disclosed for joining a drive band to the driven element of a servo-controlled precision motion system. A vibration dampening clamp assembly absorbs unwanted vibration energy. The clamp assembly utilizes energy absorbing molded grommets which mechanically isolate the driven element from the band. A threaded fastener passing through an axial bore in each of two energy absorbing grommets is used to join two halves of a clamp assembly. The grommets are preloaded at assembly using threaded fastener and a nut to compress each grommet to a known compression prior to tensioning of the drive band. Upon final tensioning of the band drive assembly, the grommets are brought to a final compression value.

Abstract: A roller is provided with a clamping mechanism that clamps into a closed position upon rotation of the roller in a winding direction, and unclamps into an open position upon rotation in an unwind direction. The roller has a split-core comprising two hollow, semicircular, core halves that toggle between the clamped and unclamped positions when pivoted about a pivot point that is concentric with the rotational axis of the roller. A snap-pivot mechanism provides a snap-action between the core halves by a leaf spring positioned between the core halves. The rotationally free core half is maintained in a fixed position by a pivoting retractable spring plunger engaging a tab on the core half, while the driven core half is rotated toward the fixed free core half, causing the leaf spring to snap to an over center position and clamp the core halves together.