Patents by Inventor Jerry Jianguo DENG

Jerry Jianguo DENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
    Publication number: 20240369947
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Application
    Filed: July 15, 2024
    Publication date: November 7, 2024
    Applicant: ASML Holding N.V.
    Inventors: Mehmet Ali AKBAS, Tammo UITTERDIJK, Christopher John MASON, Matthew LIPSON, David Hart PETERSON, Michael PERRY, Peter HELMUS, Jerry Jianguo DENG, Damoon SOHRABIBABAHEIDARY
  • Method to manufacture nano ridges in hard ceramic coatings
    Patent number: 12111581
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: October 8, 2024
    Assignee: ASML Holding N.V.
    Inventors: Mehmet Ali Akbas, Tammo Uitterdijk, Christopher John Mason, Matthew Lipson, David Hart Peterson, Michael Perry, Peter Helmus, Jerry Jianguo Deng, Damoon Sohrabibabaheidary
  • A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
    Publication number: 20210405539
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Application
    Filed: October 22, 2019
    Publication date: December 30, 2021
    Applicant: ASML Holding N.V.
    Inventors: Mehmet Ali AKBAS, Tammo UITTERDIJK, Christopher John MASON, Matthew LIPSON, David Hart PETERSON, Michael PERRY, Peter HELMUS, Jerry Jianguo DENG, Damoon SOHRABIBABAHEIDARY