Patents by Inventor Jerry Lynn Harvey, Jr.

Jerry Lynn Harvey, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ranged fault signatures for fault diagnosis
    Patent number: 7934125
    Abstract: Process data is analyzed, the process data having been generated during a manufacturing process to detect a fault. One or more process variables of the manufacturing process that contributed to the fault are determined. A relative contribution of each of the one or more process variables to the fault is determined. A fault signature having relative contribution ranges for at least one of the one or more process variables is generated, the relative contribution ranges based on the determined relative contributions.
    Type: Grant
    Filed: December 19, 2007
    Date of Patent: April 26, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Jerry Lynn Harvey, Jr., Alexander T. Schwarm
  • Ranged fault signatures for fault diagnosis
    Patent number: 7596718
    Abstract: A method and apparatus for diagnosing faults. A fault is detected. One or more process variables that contributed to the fault are determined. A relative contribution of each of the one or more process variables is determined. A determination is made as to which fault signatures match the fault, a match occurring when the relative contributions of the one or more process variables are within relative contribution ranges of the matching fault signature. Each fault signature is associated with at least one fault class.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: September 29, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Jerry Lynn Harvey, Jr., Alexander T. Schwarm
  • Adaptive multivariate fault detection
    Patent number: 7587296
    Abstract: A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate statistic of the one or more multivariate statistical models if the change is greater than a threshold value. The one or more multivariate statistical models are used to analyze subsequent process data to detect faults.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: September 8, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Jerry Lynn Harvey, Jr., Alexander T. Schwarm