Patents by Inventor Jesse N. Klein
Jesse N. Klein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10930470Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: December 11, 2019Date of Patent: February 23, 2021Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Patent number: 10741363Abstract: A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.Type: GrantFiled: October 8, 2019Date of Patent: August 11, 2020Assignee: MKS Instruments, Inc.Inventors: Aaron M. Burry, Aaron T. Radomski, Aung Toe, Jesse N. Klein
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Publication number: 20200144025Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: December 11, 2019Publication date: May 7, 2020Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Patent number: 10607821Abstract: A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.Type: GrantFiled: March 8, 2017Date of Patent: March 31, 2020Assignee: MKS Insturments, Inc.Inventors: Jesse N. Klein, David C. Halstead, Michael R. Gilbert
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Patent number: 10546724Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: May 9, 2018Date of Patent: January 28, 2020Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Publication number: 20180330921Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: May 9, 2018Publication date: November 15, 2018Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Publication number: 20170178879Abstract: A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.Type: ApplicationFiled: March 8, 2017Publication date: June 22, 2017Inventors: Jesse N. KLEIN, David C. HALSTEAD, Michael R. GILBERT
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Patent number: 9613784Abstract: A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.Type: GrantFiled: July 17, 2008Date of Patent: April 4, 2017Assignee: MKS Instruments, Inc.Inventors: Jesse N. Klein, David C. Halstead, Michael R. Gilbert
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Patent number: 9316675Abstract: A system includes a control module, a detection module, and a reaction module. The control module is configured to receive a sensor signal indicating a power characteristic of an output power provided from a power generator to a load. The load is separate from the control module and the power generator. The detection module is configured to (i) detect a shift parameter of the power characteristic based on the sensor signal, (ii) compare the shift parameter to a first threshold, and (iii) indicate whether the shift parameter has exceeded the first threshold and not a second threshold. The reaction module is configured to indicate that a low-level abnormality exists in the load in response to the shift parameter exceeding the first threshold and not the second threshold.Type: GrantFiled: March 14, 2013Date of Patent: April 19, 2016Assignee: MKS Instruments, Inc.Inventors: Jesse N. Klein, Richard Pham
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Publication number: 20140062305Abstract: A system includes a control module, a detection module, and a reaction module. The control module is configured to receive a sensor signal indicating a power characteristic of an output power provided from a power generator to a load. The load is separate from the control module and the power generator. The detection module is configured to (i) detect a shift parameter of the power characteristic based on the sensor signal, (ii) compare the shift parameter to a first threshold, and (iii) indicate whether the shift parameter has exceeded the first threshold and not a second threshold. The reaction module is configured to indicate that a low-level abnormality exists in the load in response to the shift parameter exceeding the first threshold and not the second threshold.Type: ApplicationFiled: March 14, 2013Publication date: March 6, 2014Applicant: MKS INSTRUMENTS, INC.Inventors: Jesse N. KLEIN, Richard PHAM
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Publication number: 20100012482Abstract: A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.Type: ApplicationFiled: July 17, 2008Publication date: January 21, 2010Applicant: MKS Instruments, Inc.Inventors: Jesse N. Klein, David C. Halstead, Michael R. Gilbert
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Patent number: 7336511Abstract: A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.Type: GrantFiled: April 4, 2007Date of Patent: February 26, 2008Assignee: MKS Instruments, Inc.Inventors: Sean O. Harnett, Mark D. Tracy, Jesse N. Klein
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Patent number: 7206210Abstract: A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.Type: GrantFiled: August 18, 2004Date of Patent: April 17, 2007Assignee: MKS Instruments, Inc.Inventors: Sean O. Harnett, Mark D. Tracy, Jesse N. Klein
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Patent number: 6995545Abstract: A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.Type: GrantFiled: August 18, 2003Date of Patent: February 7, 2006Assignee: MKS Instruments, Inc.Inventors: Mark D. Tracy, Jesse N. Klein