Abstract: A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.

Abstract: A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.

Abstract: A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.

Abstract: A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.

Abstract: A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two-dimensional representations of light that are produced due to an interaction between the current target and each of a plurality of diagnostic probes prior to the current target entering the target space; determining one or more moving properties of the current target based on an analysis of the detected plurality of two-dimensional representations of light, the determining being completed prior to the current target entering the target space; and, if the determined one or more moving properties of the current target are outside an acceptable range, adjusting one or more characteristics of a radiation pulse directed to the target space.

Abstract: A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two-dimensional representations of light that are produced due to an interaction between the current target and each of a plurality of diagnostic probes prior to the current target entering the target space; determining one or more moving properties of the current target based on an analysis of the detected plurality of two-dimensional representations of light, the determining being completed prior to the current target entering the target space; and, if the determined one or more moving properties of the current target are outside an acceptable range, adjusting one or more characteristics of a radiation pulse directed to the target space.

Abstract: A system for an EUV light source includes a metrology light source configured to emit a metrology light beam; and an optical beam combiner positioned to receive the metrology light beam and at least one other light beam and to direct the metrology light beam and the at least one other light beam onto a beam path toward a target region. After interacting with the optical beam combiner, the metrology light beam and the at least one other light beam have the same polarization state.

Abstract: A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two-dimensional representations of light that are produced due to an interaction between the current target and each of a plurality of diagnostic probes prior to the current target entering the target space; determining one or more moving properties of the current target based on an analysis of the detected plurality of two-dimensional representations of light, the determining being completed prior to the current target entering the target space; and, if the determined one or more moving properties of the current target are outside an acceptable range, adjusting one or more characteristics of a radiation pulse directed to the target space.