Abstract: A system and apparatus for manufacturing a low vapor pressure vapor stream lean in low volatility contaminants, and delivering same to a point of use. The system provides a transport vessel having a liquid phase or two-phase fluid held therein. The liquid and/or two-phase is transferred from said transport vessel to a vaporization vessel, wherein at least part of the liquid is vaporized. A liquid stream that is enriched in low volatility contaminants is withdrawn from the vaporization vessel, and a stream that is lean in low volatility contaminants is withdrawn from the vaporization vessel. The low vapor pressure stream is delivered to a point of use and the purity is maintained within a desired range.