Patents by Inventor Jessica VanKuiken

Jessica VanKuiken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190085209
    Abstract: A chemical mechanical polishing composition for polishing a substrate having a tungsten layer includes a water based liquid carrier, abrasive particles dispersed in the liquid carrier, an iron containing accelerator, and a cationic polymer having an amino acid monomer. A method for chemical mechanical polishing a substrate including a tungsten layer includes contacting the substrate with the above-described polishing composition, moving the polishing composition relative to the substrate, and abrading the substrate to remove a portion of the tungsten from the substrate and thereby polish the substrate.
    Type: Application
    Filed: September 14, 2018
    Publication date: March 21, 2019
    Inventors: Kevin P. DOCKERY, Tyler Carter, Matthew E. Carnes, Jessica VanKuiken, Pankaj Singh