Patents by Inventor JET-RUNG CHANG

JET-RUNG CHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11757018
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming an n-type doped region in a semiconductor substrate and forming a semiconductor stack over the semiconductor substrate. The semiconductor stack has multiple sacrificial layers and multiple semiconductor layers laid out alternately. The method also includes introducing n-type dopants from the n-type doped region into the semiconductor stack during the forming of the semiconductor stack. The method further includes patterning the semiconductor stack to form a fin structure and forming a dummy gate stack to wrap around a portion of the fin structure. In addition, the method includes removing the dummy gate stack and the sacrificial layers to release multiple semiconductor nanostructures made up of remaining portions of the semiconductor layers. The method includes forming a metal gate stack to wrap around the semiconductor nanostructures.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Te-An Yu, Hung-Ju Chou, Jet-Rung Chang, Yen-Po Lin, Jiun-Ming Kuo
  • Publication number: 20220384605
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming an n-type doped region in a semiconductor substrate and forming a semiconductor stack over the semiconductor substrate. The semiconductor stack has multiple sacrificial layers and multiple semiconductor layers laid out alternately. The method also includes introducing n-type dopants from the n-type doped region into the semiconductor stack during the forming of the semiconductor stack. The method further includes patterning the semiconductor stack to form a fin structure and forming a dummy gate stack to wrap around a portion of the fin structure. In addition, the method includes removing the dummy gate stack and the sacrificial layers to release multiple semiconductor nanostructures made up of remaining portions of the semiconductor layers. The method includes forming a metal gate stack to wrap around the semiconductor nanostructures.
    Type: Application
    Filed: May 27, 2021
    Publication date: December 1, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Te-An YU, Hung-Ju CHOU, Jet-Rung CHANG, Yen-Po LIN, Jiun-Ming KUO
  • Patent number: 10163669
    Abstract: A method for thickness measurement includes forming an implantation region in a semiconductor substrate. A semiconductor layer is formed on the implantation region of the semiconductor substrate. Modulated free carriers are generated in the implantation region of the semiconductor substrate. A probe beam is provided on the semiconductor layer and the implantation region of the semiconductor substrate with the modulated free carriers therein. The probe beam reflected from the semiconductor layer and the implantation region is detected to determine a thickness of the semiconductor layer.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ying-Chieh Hung, Ming-Hua Yu, Yi-Hung Lin, Jet-Rung Chang
  • Publication number: 20170221739
    Abstract: A method for thickness measurement includes forming an implantation region in a semiconductor substrate. A semiconductor layer is formed on the implantation region of the semiconductor substrate. Modulated free carriers are generated in the implantation region of the semiconductor substrate. A probe beam is provided on the semiconductor layer and the implantation region of the semiconductor substrate with the modulated free carriers therein. The probe beam reflected from the semiconductor layer and the implantation region is detected to determine a thickness of the semiconductor layer.
    Type: Application
    Filed: January 29, 2016
    Publication date: August 3, 2017
    Inventors: Ying-Chieh HUNG, Ming-Hua YU, Yi-Hung LIN, Jet-Rung CHANG
  • Patent number: 9000464
    Abstract: A semiconductor structure includes a temporary substrate; a first semiconductor layer positioned on the temporary substrate; a dielectric layer comprising a plurality of patterned nano-scaled protrusions disposed on the first semiconductor layer; a dielectric layer surrounding the plurality of patterned nano-scaled protrusions and disposed on the first semiconductor layer; and a second semiconductor layer positioned on the dielectric layer, wherein the top surfaces of the patterned nano-scaled protrusions are in contact with the bottom of the second semiconductor layer. An etching process is performed on the semiconductor structure to separate the first semiconductor layer and the second semiconductor layer, in order to detach the temporary substrate from the second semiconductor layer and transfer the second semiconductor layer to a permanent substrate.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: April 7, 2015
    Assignee: Design Express Limited
    Inventors: Chun-Yen Chang, Po-Min Tu, Jet-Rung Chang
  • Publication number: 20140264260
    Abstract: The present invention provides a semiconductor column structure which includes a light emitting layer and at least two facets with different crystalline orientations. The surface area ratio of the at least two facets is changed to alter the luminescence properties, such as CCT and CRI. Particularly, the surface area ratio of the at least two facets is adjusted in a range of from 1:0.1 to 1:10.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: DESIGN EXPRESS LIMITED
    Inventors: Chun Yen CHANG, Jet Rung CHANG
  • Publication number: 20130228809
    Abstract: A semiconductor structure includes a temporary substrate; a first semiconductor layer positioned on the temporary substrate; a dielectric layer comprising a plurality of patterned nano-scaled protrusions disposed on the first semiconductor layer; a dielectric layer surrounding the plurality of patterned nano-scaled protrusions and disposed on the first semiconductor layer; and a second semiconductor layer positioned on the dielectric layer, wherein the top surfaces of the patterned nano-scaled protrusions are in contact with the bottom of the second semiconductor layer. An etching process is performed on the semiconductor structure to separate the first semiconductor layer and the second semiconductor layer, in order to detach the temporary substrate from the second semiconductor layer and transfer the second semiconductor layer to a permanent substrate.
    Type: Application
    Filed: March 1, 2012
    Publication date: September 5, 2013
    Applicant: DESIGN EXPRESS LIMITED
    Inventors: CHUN-YEN CHANG, PO-MIN TU, JET-RUNG CHANG