Patents by Inventor Jhao-Rong LYU

Jhao-Rong LYU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metrology sampling method with sampling rate decision scheme and computer program product thereof
    Patent number: 10269660
    Abstract: In a metrology sampling method with a sampling rate decision scheme, a mean absolute percentage error (MAPE) and a maximum absolute percentage error (MaxErr) of visual metrology values of all workpieces in a set of determinative samples (DS), and various index values that can detect various status changes of a process tool (such as maintenance operation, parts changing, parameter adjustment, etc.), and/or information abnormalities of the process tool (such as abnormal process data, parameter drift/shift, abnormal metrology data, etc.) appearing in a manufacturing process are applied to develop an automated sampling decision (ASD) scheme for reducing a workpiece sampling rate while VM accuracy is still sustained.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: April 23, 2019
    Assignee: NATIONAL CHENG KUNG UNIVERSITY
    Inventors: Fan-Tien Cheng, Chun-Fang Chen, Jhao-Rong Lyu, Yao-Sheng Hsieh
  • METROLOGY SAMPLING METHOD WITH SAMPLING RATE DECISION SCHEME AND COMPUTER PROGRAM PRODUCT THEREOF
    Publication number: 20160349736
    Abstract: In a metrology sampling method with a sampling rate decision scheme, a mean absolute percentage error (MAPE) and a maximum absolute percentage error (MaxErr) of visual metrology values of all workpieces in a set of determinative samples (DS), and various index values that can detect various status changes of a process tool (such as maintenance operation, parts changing, parameter adjustment, etc.), and/or information abnormalities of the process tool (such as abnormal process data, parameter drift/shift, abnormal metrology data, etc.) appearing in a manufacturing process are applied to develop an automated sampling decision (ASD) scheme for reducing a workpiece sampling rate while VM accuracy is still sustained.
    Type: Application
    Filed: May 19, 2016
    Publication date: December 1, 2016
    Inventors: Fan-Tien CHENG, Chun-Fang CHEN, Jhao-Rong LYU, Yao-Sheng HSIEH