Patents by Inventor Jheng Sian Lin

Jheng Sian Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Unsupervised learning for repeater-defect detection
    Patent number: 11810284
    Abstract: To find repeater defects, optical-inspection results for one or more semiconductor wafers are obtained. Based on the optical-inspection results, a plurality of defects on the one or more semiconductor wafers is identified. Defects, of the plurality of defects, that have identical die locations on multiple die of the one or more semiconductor wafers are classified as repeater defects. Based on the optical-inspection results, unsupervised machine learning is used to cluster the repeater defects into a plurality of clusters. The repeater defects are scored. Scoring the repeater defects includes assigning respective scores to respective repeater defects based on degrees to which clusters in the plurality of clusters include multiple instances of the respective repeater defects. The repeater defects are ranked based on the respective scores.
    Type: Grant
    Filed: February 24, 2021
    Date of Patent: November 7, 2023
    Assignee: KLA Corporation
    Inventors: Jheng Sian Lin, Boon Kiat Tay
  • Unsupervised Learning for Repeater-Defect Detection
    Publication number: 20220058787
    Abstract: To find repeater defects, optical-inspection results for one or more semiconductor wafers are obtained. Based on the optical-inspection results, a plurality of defects on the one or more semiconductor wafers is identified. Defects, of the plurality of defects, that have identical die locations on multiple die of the one or more semiconductor wafers are classified as repeater defects. Based on the optical-inspection results, unsupervised machine learning is used to cluster the repeater defects into a plurality of clusters. The repeater defects are scored. Scoring the repeater defects includes assigning respective scores to respective repeater defects based on degrees to which clusters in the plurality of clusters include multiple instances of the respective repeater defects. The repeater defects are ranked based on the respective scores.
    Type: Application
    Filed: February 24, 2021
    Publication date: February 24, 2022
    Inventors: Jheng Sian Lin, Boon Kiat Tay