Patents by Inventor Jheng-Sian Ni

Jheng-Sian Ni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CLEANING QUARTZ REACTION TUBE
    Publication number: 20150096590
    Abstract: A method for cleaning quartz reaction tube is disclosed. The method includes the steps of: introducing a quartz reaction tube to a cleaning chamber, wherein the quartz reaction tube comprises a first end and a second end; sealing the first end and the second end of the quartz reaction tube with a first sealing element and a second sealing element respectively, wherein the first sealing element is coupled to an input pipe and a cleaning rod, and the second sealing element is coupled to an output pipe; supplying a first cleaning agent into the quartz reaction tube from the input pipe; utilizing the cleaning rod to perform a cleaning process; and expelling the first cleaning agent from the output pipe.
    Type: Application
    Filed: October 9, 2013
    Publication date: April 9, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Jheng-Sian Ni, Li-Yuan Chang, Chih-Ping Yen, Fei-Yu Yang