Patents by Inventor Ji Hyeong Yu

Ji Hyeong Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
    Publication number: 20240100572
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a cleaning unit configured to clean a bottom surface of the substrate supported on the support unit, and wherein the cleaning unit comprises: a body; and a protrusion formed to be upwardly protruding from the body, and the protrusion is positioned to be spaced apart from the bottom surface.
    Type: Application
    Filed: March 13, 2023
    Publication date: March 28, 2024
    Applicant: SEMES CO., LTD.
    Inventors: Sung Hun EOM, Tae Won Yun, Ha Neul Yoo, Ji Hyeong Yu