Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: The present invention relates to a light detecting and ranging (LiDAR) device for obtaining information on a distance from an object using laser light.

Abstract: The present invention relates to a light detecting and ranging (LiDAR) device for obtaining information on a distance from an object using laser light.

Abstract: A system for detecting defects includes a memory configured to store a program of instructions; and a processor configured execute the program of instructions to convert an SEM image into an image layout, determine a search space based on performing first layout matching for the image layout and a design layout, match the image layout and the design layout based on performing the second layout matching in the search space, and output defect information based on detecting defects the matched image layout and the matched design layout. The SEM image is an image obtained based on photographing a semiconductor pattern formed on a semiconductor wafer using the design layout based on using a scanning electron microscope.

Abstract: The present invention relates to a multi-channel lidar sensor module capable of measuring at least two target objects using one image sensor. The multi-channel lidar sensor module according to an embodiment of the present invention includes at least one pair of light emitting units configured to emit laser beams and a light receiving unit formed between the at least one pair of emitting units and configured to receive at least one pair of reflected laser beams which are emitted from the at least one pair of light emitting units and reflected by target objects.

Abstract: The present invention relates to a multi-channel lidar sensor module capable of measuring at least two target objects using one image sensor. The multi-channel lidar sensor module according to an embodiment of the present invention includes at least one pair of light emitting units configured to emit laser beams and a light receiving unit formed between the at least one pair of emitting units and configured to receive at least one pair of reflected laser beams which are emitted from the at least one pair of light emitting units and reflected by target objects.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: The present invention is related to a Light Detecting And Ranging (LiDAR) device configured to measure a distance using a laser, the LiDAR device including: a first laser emitting unit configured to output a first laser; a second laser emitting unit configured to output a second laser; a scanning unit configured to form a first field of view (FOV) using the first laser and a second FOV using the second laser; and a detecting unit configured to measure a distance to an object using the first and second lasers.

Abstract: A LiDAR device including a emitting unit configured to emit a laser, a detecting unit configured to detect the laser, and a controller configured to control the emitting unit and the detecting unit, wherein the controller is configured to operate the LiDAR device at in at least a first operation mode or a second operation mode in which power consumption per unit time is lower than that of the first operation mode, and wherein the controller is configured to switch an operation mode of the LiDAR device from the first operation mode to the second operation mode when the controller receives a first trigger signal from a first device, and switch the operation mode of the LiDAR device from the second operation mode to the first operation mode when the controller receives a second trigger signal from the first device.

Abstract: a LiDAR device including a laser emitting unit configured to emit laser, a laser detecting unit configured to detect laser emitted from the laser emitting unit and a controller configured to operate the LiDAR device in a first operation mode and a second operation mode in which a power consumption per unit time is lower than a power consumption per unit time of the first operation mode.

Abstract: Provided are an apparatus and a method for detecting an obstacle. The apparatus includes a light-emitting unit configured to emit a plane beam by converting a laser beam into the plane beam having a rectangular shape; a light reception unit configured to receive the laser beam which is emitted from the light-emitting unit and reflected from the obstacle; and a control unit configured to measure a distance to the obstacle by using the laser beam received in the light reception unit. Thus, an obstacle is detected by using the plane beam having a rectangular shape, so that the measurement range may be enlarged upwardly and downwardly.

Abstract: The present invention relates to a light detecting and ranging (LiDAR) device for obtaining information on a distance from an object using laser light.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: The present invention relates to a multi-channel lidar sensor module capable of measuring at least two target objects using one image sensor. The multi-channel lidar sensor module according to an embodiment of the present invention includes at least one pair of light emitting units configured to emit laser beams and a light receiving unit formed between the at least one pair of emitting units and configured to receive at least one pair of reflected laser beams which are emitted from the at least one pair of light emitting units and reflected by target objects.

Abstract: A light detection and ranging (lidar) device includes: a lower base; an upper base; a laser emitting unit for emitting a laser in a form of a point light source; a nodding mirror for transforming the laser in the form of the point light source to a line beam pattern which is perpendicular to the lower base, wherein the nodding mirror reflects the laser emitted from the laser emitting unit; a polygonal mirror for transforming the line beam pattern to a plane beam pattern and receiving a laser reflected from an object; and a sensor unit for receiving the laser reflected from the object via the polygonal mirror.

Abstract: The present invention relates to a light detecting and ranging (LiDAR) device for obtaining information on a distance from an object using laser light.