Abstract: A three-dimensional semiconductor device includes an upper substrate, a gate-stacked structure on the upper substrate, the gate-stacked structure including gate electrodes stacked within a memory cell array region, while being spaced apart from each other in a direction perpendicular to a surface of the upper substrate, and extending into an extension region adjacent to the memory cell array region to be arranged within the extension region to have a staircase shape, and at least one through region passing through the gate-stacked structure within the memory cell array region or the extension region, the at least one through region including a lower region and an upper region wider than the lower region.

Abstract: A semiconductor device includes a peripheral circuit region on a lower substrate, and including circuit elements, memory cell regions including memory cells on each of a first upper substrate and a second upper substrate, which are on the lower substrate, at least one cutting region between the first upper substrate and the second upper substrate, and at least one semiconductor pattern between the first upper substrate and the second upper substrate, and adjacent to the at least one cutting region.

Abstract: A three-dimensional semiconductor device includes an upper substrate, a gate-stacked structure on the upper substrate, the gate-stacked structure including gate electrodes stacked within a memory cell array region, while being spaced apart from each other in a direction perpendicular to a surface of the upper substrate, and extending into an extension region adjacent to the memory cell array region to be arranged within the extension region to have a staircase shape, and at least one through region passing through the gate-stacked structure within the memory cell array region or the extension region, the at least one through region including a lower region and an upper region wider than the lower region.

Abstract: A three-dimensional semiconductor device includes an upper substrate, a gate-stacked structure on the upper substrate, the gate-stacked structure including gate electrodes stacked within a memory cell array region, while being spaced apart from each other in a direction perpendicular to a surface of the upper substrate, and extending into an extension region adjacent to the memory cell array region to be arranged within the extension region to have a staircase shape, and at least one through region passing through the gate-stacked structure within the memory cell array region or the extension region, the at least one through region including a lower region and an upper region wider than the lower region.

Abstract: A vertical memory device includes a gate structure including a first gate electrode on a peripheral circuit region of a substrate, the substrate containing a cell region and the peripheral circuit region, a plurality of second gate electrodes sequentially stacked on the cell region of the substrate, the plurality of second gate electrodes spaced apart from each other in a vertical direction to an upper surface of the substrate, a channel extending in the vertical direction on the cell region of the substrate and extending through at least one of the second gate electrodes, and a first insulating interlayer covering the gate structure on the peripheral circuit region of the substrate, a cross-section in one direction of an upper surface of a portion of the first insulating interlayer overlapping the gate structure in the vertical direction having a shape of a portion of a polygon.

Abstract: A semiconductor device includes a peripheral circuit region on a lower substrate, and including circuit elements, memory cell regions including memory cells on each of a first upper substrate and a second upper substrate, which are on the lower substrate, at least one cutting region between the first upper substrate and the second upper substrate, and at least one semiconductor pattern between the first upper substrate and the second upper substrate, and adjacent to the at least one cutting region.

Abstract: A semiconductor device includes a first substrate in which a first region and a second region are defined, a first stack structure with first gate electrodes displaced and stacked sequentially on the first substrate, a second stack structure with second gate electrodes displaced and stacked sequentially on the first stack structure, a junction layer disposed between the first stack structure and the second stack structure, a first interlayer insulating layer disposed on a side surface of the first stack structure, a second interlayer insulating layer covering the second stack structure, a first channel hole that penetrates through structure(s) and/or layer(s) and a second channel hole that penetrates through structure(s) and/or layer(s). A height of the second portion of the first channel hole in a second direction orthogonal to the first direction is less than a height of the second portion of the second channel hole in the second direction.

Abstract: A semiconductor device includes a peripheral circuit region on a lower substrate, and including circuit elements, memory cell regions including memory cells on each of a first upper substrate and a second upper substrate, which are on the lower substrate, at least one cutting region between the first upper substrate and the second upper substrate, and at least one semiconductor pattern between the first upper substrate and the second upper substrate, and adjacent to the at least one cutting region.

Abstract: A vertical memory device includes gate electrodes on a substrate and a channel. The gate electrodes are spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate. The channel extends through the gate electrodes, and includes a first portion, a second portion and a third portion. The second portion is formed on and connected to the first portion, and has a sidewall slanted with respect to the upper surface of the substrate so as to have a width gradually decreasing from a bottom toward a top thereof. The third portion is formed on and connected to the second portion.

Abstract: A semiconductor device may include a substrate and a stacked structure in which a plurality of insulating layers and a plurality of interconnection layers are alternately stacked on the substrate. An isolation region may cross the stacked structure in a first direction. A plurality of first structures may extend into the stacked structure in a second direction perpendicular to the first direction. A plurality of first patterns may extend into the stacked structure in the second direction in the isolation region. Bottoms of the plurality of first patterns may be farther from an upper surface of the substrate than bottoms of the plurality of channel structures.

Abstract: A vertical memory device includes a gate structure including a first gate electrode on a peripheral circuit region of a substrate, the substrate containing a cell region and the peripheral circuit region, a plurality of second gate electrodes sequentially stacked on the cell region of the substrate, the plurality of second gate electrodes spaced apart from each other in a vertical direction to an upper surface of the substrate, a channel extending in the vertical direction on the cell region of the substrate and extending through at least one of the second gate electrodes, and a first insulating interlayer covering the gate structure on the peripheral circuit region of the substrate, a cross-section in one direction of an upper surface of a portion of the first insulating interlayer overlapping the gate structure in the vertical direction having a shape of a portion of a polygon.

Abstract: A semiconductor device includes a first substrate in which a first region and a second region are defined, a first stack structure with first gate electrodes displaced and stacked sequentially on the first substrate, a second stack structure with second gate electrodes displaced and stacked sequentially on the first stack structure, a junction layer disposed between the first stack structure and the second stack structure, a first interlayer insulating layer disposed on a side surface of the first stack structure, a second interlayer insulating layer covering the second stack structure, a first channel hole that penetrates through structure(s) and/or layer(s) and a second channel hole that penetrates through structure(s) and/or layer(s). A height of the second portion of the first channel hole in a second direction orthogonal to the first direction is less than a height of the second portion of the second channel hole in the second direction.

Abstract: A vertical memory device includes a gate structure including a first gate electrode on a peripheral circuit region of a substrate, the substrate containing a cell region and the peripheral circuit region, a plurality of second gate electrodes sequentially stacked on the cell region of the substrate, the plurality of second gate electrodes spaced apart from each other in a vertical direction to an upper surface of the substrate, a channel extending in the vertical direction on the cell region of the substrate and extending through at least one of the second gate electrodes, and a first insulating interlayer covering the gate structure on the peripheral circuit region of the substrate, a cross-section in one direction of an upper surface of a portion of the first insulating interlayer overlapping the gate structure in the vertical direction having a shape of a portion of a polygon.

Abstract: A three-dimensional semiconductor memory device includes a substrate including a cell array region and a connecting region; a stacked structure including a lower stacked structure and an upper stacked structure sequentially stacked on a substrate, wherein the stacked structure includes an insulating layer and electrodes alternately stacked vertically on the substrate; a vertical structure in a channel hole passing through the lower stacked structure and the upper stacked structure on the cell array region; and a dummy structure in a dummy hole passing through at least one of a lower stacked structure and an upper stacked structure on a connecting region. The connecting region includes a second connecting region on one side of the cell array region and a first connecting region on one side of the second connecting region. A surface pattern shape of the dummy hole in the second connecting region is different from a shape of the dummy hole in the first connecting region.

Abstract: A three-dimensional semiconductor memory device includes a substrate including a cell array region and a connecting region; a stacked structure including a lower stacked structure and an upper stacked structure sequentially stacked on a substrate, wherein the stacked structure includes an insulating layer and electrodes alternately stacked vertically on the substrate; a vertical structure in a channel hole passing through the lower stacked structure and the upper stacked structure on the cell array region; and a dummy structure in a dummy hole passing through at least one of a lower stacked structure and an upper stacked structure on a connecting region. The connecting region includes a second connecting region on one side of the cell array region and a first connecting region on one side of the second connecting region. A surface pattern shape of the dummy hole in the second connecting region is different from a shape of the dummy hole in the first connecting region.

Abstract: A semiconductor device may include a substrate and a stacked structure in which a plurality of insulating layers and a plurality of interconnection layers are alternately stacked on the substrate. An isolation region may cross the stacked structure in a first direction. A plurality of first structures may extend into the stacked structure in a second direction perpendicular to the first direction. A plurality of first patterns may extend into the stacked structure in the second direction in the isolation region. Bottoms of the plurality of first patterns may be farther from an upper surface of the substrate than bottoms of the plurality of channel structures.

Abstract: A vertical memory device includes gate electrodes on a substrate and a channel. The gate electrodes are spaced apart from each other in a vertical direction substantially perpendicular to an upper surface of the substrate. The channel extends through the gate electrodes, and includes a first portion, a second portion and a third portion. The second portion is formed on and connected to the first portion, and has a sidewall slanted with respect to the upper surface of the substrate so as to have a width gradually decreasing from a bottom toward a top thereof. The third portion is formed on and connected to the second portion.

Abstract: A vertical memory device includes: a gate electrode structure including a ground selection line (GSL), a word line and a string selection line (SSL) sequentially stacked on a substrate in a first direction substantially perpendicular to an upper surface of the substrate; and a channel extending through the gate electrode structure in the first direction, wherein the GSL has a doped polysilicon pattern and a first metal pattern including a metal or a metal silicide, and the doped polysilicon pattern and the first metal pattern are stacked in the first direction, and wherein each of the word line and the SSL has a second metal pattern including a metal.

Abstract: A semiconductor device includes a peripheral circuit region on a lower substrate, and including circuit elements, memory cell regions including memory cells on each of a first upper substrate and a second upper substrate, which are on the lower substrate, at least one cutting region between the first upper substrate and the second upper substrate, and at least one semiconductor pattern between the first upper substrate and the second upper substrate, and adjacent to the at least one cutting region.

Abstract: A vertical memory device includes a gate structure including a first gate electrode on a peripheral circuit region of a substrate, the substrate containing a cell region and the peripheral circuit region, a plurality of second gate electrodes sequentially stacked on the cell region of the substrate, the plurality of second gate electrodes spaced apart from each other in a vertical direction to an upper surface of the substrate, a channel extending in the vertical direction on the cell region of the substrate and extending through at least one of the second gate electrodes, and a first insulating interlayer covering the gate structure on the peripheral circuit region of the substrate, a cross-section in one direction of an upper surface of a portion of the first insulating interlayer overlapping the gate structure in the vertical direction having a shape of a portion of a polygon.