Abstract: Embodiments of the invention couple a non-linear force to a vibration element such as a piezoelectric cantilever to introduce chaotic, i.e., non-resonant vibration in the vibration element and thereby improve the non-resonant response of the vibration element. By doing so, the vibration element is responsive to a wider frequency range of vibrations and thus may be more efficient in scavenging energy in environments where the vibration frequency is not constant, e.g., in environment subject to multi-mode or random vibration sources.

Abstract: An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.

Abstract: An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.