Patents by Inventor Jia-Cheng Hsu
Jia-Cheng Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250120166Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises forming a first stack structure and a second stack structure in a first area over a substrate, wherein each of the stack structures includes semiconductor layers separated and stacked up; depositing a first interfacial layer around each of the semiconductor layers of the stack structures; depositing a gate dielectric layer around the first interfacial layer; forming a dipole oxide layer around the gate dielectric layer; removing the dipole oxide layer around the gate dielectric layer of the second stack structure; performing an annealing process to form a dipole gate dielectric layer for the first stack structure and a non-dipole gate dielectric layer for the second stack structure; and depositing a first gate electrode around the dipole gate dielectric layer of the first stack structure and the non-dipole gate dielectric layer of the second stack structure.Type: ApplicationFiled: December 16, 2024Publication date: April 10, 2025Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Hou-Yu Chen, Ching-Wei Tsai, Chih-Hao Wang, Lung-Kun Chu, Mao-Lin Huang, Jia-Ni Yu
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Publication number: 20250120123Abstract: A semiconductor device structure and methods of forming the same are described. The structure includes a gate dielectric layer disposed over a substrate, a gate electrode layer disposed over the gate dielectric layer, and a first gate spacer disposed adjacent the gate dielectric layer, wherein the first gate spacer comprises an inner surface facing the gate dielectric layer and an outer surface opposite the inner surface, and the first gate spacer includes an oxygen concentration that decreases from the inner surface towards the outer surface of the first gate spacer.Type: ApplicationFiled: January 24, 2024Publication date: April 10, 2025Inventors: Chun-Fu LU, Lung-Kun CHU, Jia-Ni YU, Chung-Wei HSU, Shih-Hao LAI, Kuo-Cheng CHIANG, Chih-Hao WANG
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Patent number: 12271006Abstract: Disclosed is a cost-effective method to fabricate a multifunctional collimator structure for contact image sensors to filter ambient infrared light to reduce noises. In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; a plurality of via holes; and a conductive layer, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, and wherein the conductive layer is formed over at least one of the following: the first surface of the first dielectric layer and a portion of sidewalls of each of the plurality of via holes, and wherein the conductive layer is configured so as to allow the optical collimator to filter light in a range of wavelengths.Type: GrantFiled: August 8, 2023Date of Patent: April 8, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsin-Yu Chen, Yen-Chiang Liu, Jiun-Jie Chiou, Jia-Syuan Li, You-Cheng Jhang, Shin-Hua Chen, Lavanya Sanagavarapu, Han-Zong Pan, Chun-Peng Li, Chia-Chun Hung, Ching-Hsiang Hu, Wei-Ding Wu, Jui-Chun Weng, Ji-Hong Chiang, Hsi-Cheng Hsu
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Publication number: 20250107152Abstract: A semiconductor device includes a channel portion disposed on and spaced apart from a substrate, a gate dielectric which includes an upper dielectric region disposed on the channel portion, a first inner gate structure disposed between the substrate and the upper dielectric region, and an outer gate structure including an outer work-function portion and a cap portion. The outer work-function portion covers the upper dielectric region and the first inner gate structure. The cap portion covers the outer work-function portion in a way that the cap portion is separated from the first inner gate structure. The first inner gate structure includes a first work-function material and a conductive material that is different from the first work-function material. The outer work-function portion includes a second work-function material that is different from the conductive material.Type: ApplicationFiled: September 22, 2023Publication date: March 27, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Wei HSU, Lung-Kun CHU, Jia-Ni YU, Chun-Fu LU, Shih-Hao LAI, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20250089403Abstract: A transparent display device includes a transparent display panel and a functional film. The transparent display panel includes a transparent substrate and a pixel array. The functional film is disposed on the transparent display panel. The pixel array is located between the functional film and the transparent substrate. A surface of the functional film facing away from the transparent substrate has raised microstructures. At least a portion of each of the raised microstructures extends in a first oblique direction. A size of the least a portion of each of the raised microstructures is gradually decreased along the first oblique direction. The first oblique direction forms an acute angle ? with a normal direction of the transparent substrate.Type: ApplicationFiled: November 30, 2023Publication date: March 13, 2025Applicant: AUO CorporationInventors: YuTang Tsai, Wang-Shuo Kao, Jia Hao Hsu, Kun-Cheng Tien, Jia-Long Wu
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Publication number: 20250072050Abstract: An integrated circuit includes a transistor having a plurality of stacked channels each extending between the source/drain regions of the transistor. The transistor also includes a hard mask nanostructure above the highest channel and extending between the source/drain regions of the transistor. A gate dielectric and gate metals wrap around the channels and the hard mask nanostructure.Type: ApplicationFiled: January 4, 2024Publication date: February 27, 2025Inventors: Chung-Wei HSU, Lung-Kun CHU, Jia-Ni YU, Chun-Fu LU, Shih-Hao LAI, Kuo-Cheng CHIANG, Chih-Hao WANG
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Patent number: 12237373Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.Type: GrantFiled: April 3, 2023Date of Patent: February 25, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Lung-Kun Chu, Jia-Ni Yu, Chung-Wei Hsu, Chih-Hao Wang, Kuo-Cheng Chiang, Kuan-Lun Cheng, Mao-Lin Huang
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Patent number: 12237396Abstract: Multi-gate devices and methods for fabricating such are disclosed herein. An exemplary method includes forming a gate dielectric layer around first channel layers in a p-type gate region and around second channel layers in an n-type gate region. Sacrificial features are formed between the second channel layers in the n-type gate region. A p-type work function layer is formed over the gate dielectric layer in the p-type gate region and the n-type gate region. After removing the p-type work function layer from the n-type gate region, the sacrificial features are removed from between the second channel layers in the n-type gate region. An n-type work function layer is formed over the gate dielectric layer in the n-type gate region. A metal fill layer is formed over the p-type work function layer in the p-type gate region and the n-type work function layer in the n-type gate region.Type: GrantFiled: July 26, 2022Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Ni Yu, Kuo-Cheng Chiang, Lung-Kun Chu, Chung-Wei Hsu, Chih-Hao Wang, Mao-Lin Huang
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Patent number: 12237372Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.Type: GrantFiled: April 3, 2023Date of Patent: February 25, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Lung-Kun Chu, Jia-Ni Yu, Chung-Wei Hsu, Chih-Hao Wang, Kuo-Cheng Chiang, Kuan-Lun Cheng, Mao-Lin Huang
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Patent number: 12237418Abstract: A semiconductor device includes a semiconductor layer. A gate structure is disposed over the semiconductor layer. A spacer is disposed on a sidewall of the gate structure. A height of the spacer is greater than a height of the gate structure. A liner is disposed on the gate structure and on the spacer. The spacer and the liner have different material compositions.Type: GrantFiled: August 4, 2023Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Huan-Chieh Su, Chih-Hao Wang, Kuo-Cheng Chiang, Wei-Hao Wu, Zhi-Chang Lin, Jia-Ni Yu, Yu-Ming Lin, Chung-Wei Hsu
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Publication number: 20250063879Abstract: A transparent display apparatus includes a transparent substrate, a first pixel array and a light leakage suppression element. The transparent substrate has display areas and transparent areas. The first pixel array is disposed on the transparent substrate and includes first pixels and first openings. Each of the first pixel overlaps with a corresponding display area. Each of the first opening overlaps with a corresponding transparent area. The light leakage suppression element includes light blocking structures spaced apart from each other. The first pixels are disposed on a first side of the transparent substrate. At least a portion of each of the light blocking structures of the light leakage suppression element is disposed on a second side of the transparent substrate.Type: ApplicationFiled: December 8, 2023Publication date: February 20, 2025Applicant: AUO CorporationInventors: YuTang Tsai, Wang-Shuo Kao, Jia Hao Hsu, Kun-Cheng Tien
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Publication number: 20250063792Abstract: Gate isolation processes (e.g., gate-to-source/drain contact isolation) are described herein. An exemplary contact gate isolation process may include recessing (e.g., by etching) sidewall portions of a high-k gate dielectric and gate spacers of a gate structure to form a contact gate isolation (CGI) opening that exposes sidewalls of a gate electrode of the gate structure, forming a gate isolation liner along the sidewalls of the gate electrode that partially fills the CGI opening, and forming a gate isolation layer over the gate isolation liner that fills a remainder of the CGI opening. A dielectric constant of the gate isolation liner is less than a dielectric constant of the high-k gate dielectric. A dielectric constant of the gate isolation layer is less than a dielectric constant of the high-k gate dielectric. A dielectric constant of the gate isolation layer may be less than a dielectric constant of the gate isolation layer.Type: ApplicationFiled: December 1, 2023Publication date: February 20, 2025Inventors: Jia-Chuan YOU, Chia-Hao CHANG, Chu-Yuan HSU, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20250056867Abstract: An integrated circuit includes a nanosheet transistor having a plurality of stacked channels, a gate electrode surrounding the stacked channels, a source/drain region, and a source/drain contact. The integrated circuit includes a first dielectric layer between the gate metal and the source/drain contact, a second dielectric layer on the first dielectric layer, and a cap metal on the first gate metal and on a hybrid fin structure. The second dielectric layer is on the hybrid fin structure between the cap metal and the source/drain contact.Type: ApplicationFiled: October 30, 2024Publication date: February 13, 2025Inventors: Chia-Hao CHANG, Jia-Chuan YOU, Chu-Yuan HSU, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20250056848Abstract: A semiconductor device structure and a method for forming a semiconductor device structure are provided. The method includes forming a metal gate stack wrapped around multiple semiconductor nanostructures. The semiconductor nanostructures are beside an epitaxial structure. The method includes forming a dielectric layer over the metal gate stack and the epitaxial structure. The method further includes forming a contact opening in the dielectric layer and forming a protective layer over sidewalls of the contact opening. In addition, the method includes deepening the contact opening so that the contact opening extends into the epitaxial structure after the formation of the protective layer. The method includes forming a conductive contact filling the contact opening.Type: ApplicationFiled: August 9, 2023Publication date: February 13, 2025Inventors: Chu-Yuan HSU, Jia-Chuan YOU, Chia-Hao CHANG, Kuo-Cheng CHIANG, I-Han HUANG
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Publication number: 20250054765Abstract: An integrated circuit includes a first nanostructure transistor having a first gate electrode and a second nanostructure transistor having a second gate electrode. A dielectric isolation structure is between the first and second gate electrodes. A gate connection metal is on a portion of the top surface of the first gate electrode and on a portion of a top surface of the second gate electrode. The gate connection metal is patterned to expose other portions of the top surfaces of the first and second gate electrodes adjacent to the dielectric isolation structure. A conductive via contacts the exposed portion of the top surface of the second gate electrode.Type: ApplicationFiled: October 30, 2024Publication date: February 13, 2025Inventors: Jia-Chuan YOU, Chia-Hao CHANG, Chu-Yuan HSU, Kuo-Cheng CHIANG, Chih-Hao WANG
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Publication number: 20250036977Abstract: An electronic device is configured to execute instructions: compiling a first AI model and second AI model(s) to a first compiled file and second compiled file(s), respectively, wherein the first compiled file comprises a first data set and a first command set, and the second compiled file(s) comprises second data set(s) and second command set(s); generating light version file(s) for the AI model(s), wherein the light version file(s) comprises the second command set(s) and data patch(es); storing the first compiled file and the light version file(s) to a storage device; loading the first compiled file from the storage device to a memory; loading the light version file(s) from the storage device to the memory; generating the second data set(s) according to the first data set and the data patch(es); and executing the second AI model(s) according to the generated second data set(s) and the second command set(s) in the memory.Type: ApplicationFiled: June 23, 2024Publication date: January 30, 2025Applicant: MEDIATEK INC.Inventors: Chia-Wei Hsu, Yu-Lung Lu, Yen-Ting Chiang, Chih-wei Chen, Yi-Cheng Lu, Jia-Sian Hong, Kuan-Yu Chen, Pei-Kuei Tsung, Hua Wu
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Publication number: 20250040315Abstract: A transparent display apparatus includes a first transparent substrate, first to third light-emitting elements, and a first frequency band blocking filter. The first transparent substrate has a first display area and a first transparent area outside the first display area. The first to third light-emitting elements are disposed at the first display area and respectively used for emitting first to third color lights. The first frequency band blocking filter is disposed on a transmission path of the first to third color lights. The first frequency band blocking filter has first to third blocking bands respectively corresponding to the first to third color lights. FWHM of the first to third blocking bands fall in a range of 15 nm to 55 nm.Type: ApplicationFiled: November 30, 2023Publication date: January 30, 2025Applicant: AUO CorporationInventors: YuTang Tsai, Jia Hao Hsu, Kun-Cheng Tien, Chien-Huang Liao, Chin-An Lin
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Patent number: 12206005Abstract: A structure has stacks of semiconductor layers over a substrate and adjacent a dielectric feature. A gate dielectric is formed wrapping around each layer and the dielectric feature. A first layer of first gate electrode material is deposited over the gate dielectric and the dielectric feature. The first layer on the dielectric feature is recessed to a first height below a top surface of the dielectric feature. A second layer of the first gate electrode material is deposited over the first layer. The first gate electrode material in a first region of the substrate is removed to expose a portion of the gate dielectric in the first region, while the first gate electrode material in a second region of the substrate is preserved. A second gate electrode material is deposited over the exposed portion of the gate dielectric and over a remaining portion of the first gate electrode material.Type: GrantFiled: July 28, 2023Date of Patent: January 21, 2025Assignee: TAIWAN SEMICONDICTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
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Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith
Patent number: 9687956Abstract: The invention provides a polishing pad and a method of using the polishing pad for chemically-mechanically polishing a substrate. The polishing pad comprises a plurality of grooves composed of at least a first plurality of concentric grooves having a first center of concentricity, and a second plurality of concentric grooves having a second center of concentricity. The first center of concentricity is not coincident with the second center of concentricity, the axis of rotation of the polishing pad is not coincident with at least one of the first center of concentricity and the second center of concentricity, the plurality of grooves does not consist of a continuous spiral groove, and the polishing surface does not comprise a mosaic groove pattern.Type: GrantFiled: November 5, 2013Date of Patent: June 27, 2017Assignee: Cabot Microelectronics CorporationInventors: Ching-Ming Tsai, Shi-Wei Cheng, Kun-Shu Yang, Jia-Cheng Hsu, Sheng-Huan Liu, Feng-Chih Hsu, Craig Kokjohn -
Patent number: 9409276Abstract: The invention provides a polishing pad and a method of using the polishing pad for chemically-mechanically polishing a substrate. The polishing pad comprises at least a grooved region and an exclusion region, wherein the exclusion region is adjacent to the circumference of the polishing pad, and wherein the exclusion region is devoid of grooves.Type: GrantFiled: October 16, 2014Date of Patent: August 9, 2016Assignee: Cabot Microelectronics CorporationInventors: Ching-Ming Tsai, Shi-Wei Cheng, Jia-Cheng Hsu, Kun-Shu Yang, Hui-Feng Chen, Gregory Gaudet, Sheng-Huan Liu