Abstract: The present disclosure provides a method for preparing a high cohesive energy adsorbent for fluoride removal, which includes the following steps: S1. adding NaHF2—NiF·6H2O additive to SiCO ceramic powder, and sintering at a temperature of 310-330° C. for 18-22h to obtain a sintered substance; S2. grinding the sintered substance to obtain particles with a size of 2-3 mm, and mixing the particles with polyacrylonitrile to form a composite polymer; and S3. molding the composite polymer by a vacuum baking process at a temperature of 75-85° C., then performing ball milling and sieving to obtain the high cohesive energy adsorbent for fluoride removal. The high cohesive energy adsorbent for fluoride removal may be used in the adsorption and separation of the C2F6—CHF3—CClF3 mixture system, and the contents of CHF3 and CClF3 are lowered to less than 10ppmv.

Abstract: The present disclosure provides a control method for a rectification and purification system of electronic-grade chlorine trifluoride. A rectification device of electronic-grade chlorine trifluoride includes a two-stage cryogenic rectification device including a low-boiling column and a high-boiling column. An extraction agent is arranged in the two-stage cryogenic rectification device for further dissociating associated molecules of hydrogen fluoride and chlorine trifluoride to meet the requirements of electronic-grade chlorine trifluoride. The reflux ratio parameter stability of a vapor-liquid (chlorine trifluoride-hydrogen fluoride) phase equilibrium system can be effectively improved by a column plate temperature control method, thus realizing wide dynamic smooth running under various working conditions.

Abstract: The present disclosure provides a control method for a rectification and purification system of electronic-grade chlorine trifluoride. A rectification device of electronic-grade chlorine trifluoride includes a two-stage cryogenic rectification device including a low-boiling column and a high-boiling column. An extraction agent is arranged in the two-stage cryogenic rectification device for further dissociating associated molecules of hydrogen fluoride and chlorine trifluoride to meet the requirements of electronic-grade chlorine trifluoride. The reflux ratio parameter stability of a vapor-liquid (chlorine trifluoride-hydrogen fluoride) phase equilibrium system can be effectively improved by a column plate temperature control method, thus realizing wide dynamic smooth running under various working conditions.

Abstract: The present disclosure provides a method for preparing a high cohesive energy adsorbent for fluoride removal, which includes the following steps: S1. adding NaHF2—NiF·6H2O additive to SiCO ceramic powder, and sintering at a temperature of 310-330° C. for 18-22h to obtain a sintered substance; S2. grinding the sintered substance to obtain particles with a size of 2-3 mm, and mixing the particles with polyacrylonitrile to form a composite polymer; and S3. molding the composite polymer by a vacuum baking process at a temperature of 75-85° C., then performing ball milling and sieving to obtain the high cohesive energy adsorbent for fluoride removal. The high cohesive energy adsorbent for fluoride removal may be used in the adsorption and separation of the C2F6—CHF3—CClF3 mixture system, and the contents of CHF3 and CClF3 are lowered to less than 10ppmv.

Abstract: A method for preparing a modified sodium fluoride adsorbent includes the following steps: S1. producing spherical particles of NiCl12.6H2O and porous NaF with a mass ratio of 1:3.0-3.5; S2. sintering the spherical particles in a vacuum environment at a temperature of 120-130° C. for 10-40 hours and at a temperature of 280-300° C. for 10-40 hours, respectively, to form an adsorbent intermediate with a NiCl2—NaF framework, wherein, a vacuum degree is less than or equal to 500 pa; and S3. treating the adsorbent intermediate by fluorine-nitrogen mixtures with high purity to obtain the novel sodium fluoride adsorbent having NiCl2—NaF framework. The modified sodium fluoride adsorbent can effectively separate chlorine trifluoride and hydrogen fluoride molecules, and the optimal adsorption rate of hydrogen fluoride is upgraded to more than 98%. While, the optimal adsorption rate of chlorine trifluoride is lowered down to around 3%.