Patents by Inventor Jia-Ming Lin
Jia-Ming Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12205819Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes: a first source and a first drain separated by a first distance, a first semiconductor structure disposed between the first source and first drain, a first gate electrode disposed over the first semiconductor structure, and a first dielectric structure disposed over the first gate electrode. The first dielectric structure has a lower portion and an upper portion disposed over the lower portion and wider than the lower portion. The second transistor includes: a second source and a second drain separated by a second distance greater than the first distance, a second semiconductor structure disposed between the second source and second drain, a second gate electrode disposed over the second semiconductor structure, and a second dielectric structure disposed over the second gate electrode. The second dielectric structure and the first dielectric structure have different material compositions.Type: GrantFiled: December 5, 2022Date of Patent: January 21, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Huan-Chieh Su, Zhi-Chang Lin, Ting-Hung Hsu, Jia-Ni Yu, Wei-Hao Wu, Yu-Ming Lin, Chih-Hao Wang
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Publication number: 20240372034Abstract: A light emitting device including an active layer, a first semiconductor layer, a first contact layer, and a first current limiting layer is provided. The first semiconductor layer is disposed at a first side of the active layer. The first contact layer is disposed at a side of the first semiconductor layer away from the active layer. The first current limiting layer is disposed between the first contact layer and the active layer, and is provided with a first non-oxidizing region and a first oxidizing region located around the first non-oxidizing region. The first current limiting layer has a first surface facing the active layer and a second surface away from the first surface. The first oxidizing region is extended from the first surface to the second surface, and an oxygen content of the first oxidizing region is greater than an oxygen content of the first non-oxidizing region.Type: ApplicationFiled: September 14, 2023Publication date: November 7, 2024Applicant: AUO CorporationInventors: Chao-Hsin Wu, Chee Keong Yee, Jia Ming Lin, Chia-An Lee, Kuan-Heng Lin
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Publication number: 20240371981Abstract: A method of forming a semiconductor device includes: forming a dummy gate over a fin, where the fin protrudes above a substrate; surrounding the dummy gate with a dielectric material; and replacing the dummy gate with a replacement gate structure, where replacing the dummy gate includes: forming a gate trench in the dielectric material, where forming the gate trench includes removing the dummy gate; forming a metal-gate stack in the gate trench, where forming the metal-gate stack includes forming a gate dielectric layer, a first work function layer, and a gap-filling material sequentially in the gate trench; and enlarging a volume of the gap-filling material in the gate trench.Type: ApplicationFiled: July 17, 2024Publication date: November 7, 2024Inventors: Chih-Hsiang Fan, Tsung-Han Shen, Jia-Ming Lin, Wei-Chin Lee, Hsien-Ming Lee, Chi On Chui
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Publication number: 20240364127Abstract: An electronic device and a power management method thereof are provided. The power management method includes: detecting a plurality of status information of a plurality of operation statuses of a battery set; determining an information value range within which each of the status information of each of the operation statuses falls, calculating a weighting value of each of the operation statuses according to the information value range; and calculating a weighting value sum corresponding to the weighting values of the operation statuses to set a load capacity of the battery set according to the weighting value sum.Type: ApplicationFiled: November 14, 2023Publication date: October 31, 2024Applicant: COMPAL ELECTRONICS, INC.Inventors: Chih-Fan Weng, Wei-Chih Shih, Yi-Hsun Lin, Ping-Wen Kuo, Chang-Hsiang Tsao, Jia-Ming Lin, Min-Hsiu Hsieh
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Patent number: 12100751Abstract: A method of forming a semiconductor device includes: forming a dummy gate over a fin, where the fin protrudes above a substrate; surrounding the dummy gate with a dielectric material; and replacing the dummy gate with a replacement gate structure, where replacing the dummy gate includes: forming a gate trench in the dielectric material, where forming the gate trench includes removing the dummy gate; forming a metal-gate stack in the gate trench, where forming the metal-gate stack includes forming a gate dielectric layer, a first work function layer, and a gap-filling material sequentially in the gate trench; and enlarging a volume of the gap-filling material in the gate trench.Type: GrantFiled: March 20, 2023Date of Patent: September 24, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Hsiang Fan, Tsung-Han Shen, Jia-Ming Lin, Wei-Chin Lee, Hsien-Ming Lee, Chi On Chui
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Publication number: 20240249938Abstract: A method includes removing a first dummy gate structure to form a recess around a first nanostructure and a second nanostructure; depositing a sacrificial layer in the recess with a flowable chemical vapor deposition (CVD); and patterning the sacrificial layer to leave a portion of the sacrificial layer between the first nanostructure and the second nanostructure. The method further include depositing a first work function metal in first recess; removing the first work function metal and the portion of the sacrificial layer from the recess; depositing a second work function metal in the recess, wherein the second work function metal is of an opposite type than the first work function metal; and depositing a fill metal over the second work function metal in the recess.Type: ApplicationFiled: March 8, 2024Publication date: July 25, 2024Inventors: Hsin-Yi Lee, Jia-Ming Lin, Kun-Yu Lee, Chi On Chui
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Patent number: 11967504Abstract: A method includes removing a first dummy gate structure to form a recess around a first nanostructure and a second nanostructure; depositing a sacrificial layer in the recess with a flowable chemical vapor deposition (CVD); and patterning the sacrificial layer to leave a portion of the sacrificial layer between the first nanostructure and the second nanostructure. The method further include depositing a first work function metal in first recess; removing the first work function metal and the portion of the sacrificial layer from the recess; depositing a second work function metal in the recess, wherein the second work function metal is of an opposite type than the first work function metal; and depositing a fill metal over the second work function metal in the recess.Type: GrantFiled: November 22, 2021Date of Patent: April 23, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsin-Yi Lee, Jia-Ming Lin, Kun-Yu Lee, Chi On Chui
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Publication number: 20230326967Abstract: In an embodiment, a device includes: a first nanostructure; a second nanostructure; a gate dielectric around the first nanostructure and the second nanostructure, the gate dielectric including dielectric materials; and a gate electrode including: a work function tuning layer on the gate dielectric, the work function tuning layer including a pure work function metal, the pure work function metal of the work function tuning layer and the dielectric materials of the gate dielectric completely filling a region between the first nanostructure and the second nanostructure, the pure work function metal having a composition of greater than 95 at. % metals; an adhesion layer on the work function tuning layer; and a fill layer on the adhesion layer.Type: ApplicationFiled: June 13, 2023Publication date: October 12, 2023Inventors: Hsin-Yi Lee, Jia-Ming Lin, Chi On Chui
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Patent number: 11715762Abstract: In an embodiment, a device includes: a first nanostructure; a second nanostructure; a gate dielectric around the first nanostructure and the second nanostructure, the gate dielectric including dielectric materials; and a gate electrode including: a work function tuning layer on the gate dielectric, the work function tuning layer including a pure work function metal, the pure work function metal of the work function tuning layer and the dielectric materials of the gate dielectric completely filling a region between the first nanostructure and the second nanostructure, the pure work function metal having a composition of greater than 95 at. % metals; an adhesion layer on the work function tuning layer; and a fill layer on the adhesion layer.Type: GrantFiled: April 1, 2021Date of Patent: August 1, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yi Lee, Jia-Ming Lin, Chi On Chui
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Publication number: 20230231037Abstract: A method of forming a semiconductor device includes: forming a dummy gate over a fin, where the fin protrudes above a substrate; surrounding the dummy gate with a dielectric material; and replacing the dummy gate with a replacement gate structure, where replacing the dummy gate includes: forming a gate trench in the dielectric material, where forming the gate trench includes removing the dummy gate; forming a metal-gate stack in the gate trench, where forming the metal-gate stack includes forming a gate dielectric layer, a first work function layer, and a gap-filling material sequentially in the gate trench; and enlarging a volume of the gap-filling material in the gate trench.Type: ApplicationFiled: March 20, 2023Publication date: July 20, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hsiang Fan, Tsung-Han Shen, Jia-Ming Lin, Wei-Chin Lee, Hsien-Ming Lee, Chi On Chui
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Patent number: 11610982Abstract: A method of forming a semiconductor device includes: forming a dummy gate over a fin, where the fin protrudes above a substrate; surrounding the dummy gate with a dielectric material; and replacing the dummy gate with a replacement gate structure, where replacing the dummy gate includes: forming a gate trench in the dielectric material, where forming the gate trench includes removing the dummy gate; forming a metal-gate stack in the gate trench, where forming the metal-gate stack includes forming a gate dielectric layer, a first work function layer, and a gap-filling material sequentially in the gate trench; and enlarging a volume of the gap-filling material in the gate trench.Type: GrantFiled: January 4, 2021Date of Patent: March 21, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Hsiang Fan, Tsung-Han Shen, Jia-Ming Lin, Wei-Chin Lee, Hsien-Ming Lee, Chi On Chui
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Publication number: 20220406598Abstract: A method includes removing a first dummy gate structure to form a recess around a first nanostructure and a second nanostructure; depositing a sacrificial layer in the recess with a flowable chemical vapor deposition (CVD); and patterning the sacrificial layer to leave a portion of the sacrificial layer between the first nanostructure and the second nanostructure. The method further include depositing a first work function metal in first recess; removing the first work function metal and the portion of the sacrificial layer from the recess; depositing a second work function metal in the recess, wherein the second work function metal is of an opposite type than the first work function metal; and depositing a fill metal over the second work function metal in the recess.Type: ApplicationFiled: November 22, 2021Publication date: December 22, 2022Inventors: Hsin-Yi Lee, Jia-Ming Lin, Kun-Yu Lee, Chi On Chui
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Publication number: 20220238648Abstract: In an embodiment, a device includes: a first nanostructure; a second nanostructure; a gate dielectric around the first nanostructure and the second nanostructure, the gate dielectric including dielectric materials; and a gate electrode including: a work function tuning layer on the gate dielectric, the work function tuning layer including a pure work function metal, the pure work function metal of the work function tuning layer and the dielectric materials of the gate dielectric completely filling a region between the first nanostructure and the second nanostructure, the pure work function metal having a composition of greater than 95 at. % metals; an adhesion layer on the work function tuning layer; and a fill layer on the adhesion layer.Type: ApplicationFiled: April 1, 2021Publication date: July 28, 2022Inventors: Hsin-Yi Lee, Jia-Ming Lin, Chi On Chui
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Publication number: 20220085187Abstract: A method of forming a semiconductor device includes: forming a dummy gate over a fin, where the fin protrudes above a substrate; surrounding the dummy gate with a dielectric material; and replacing the dummy gate with a replacement gate structure, where replacing the dummy gate includes: forming a gate trench in the dielectric material, where forming the gate trench includes removing the dummy gate; forming a metal-gate stack in the gate trench, where forming the metal-gate stack includes forming a gate dielectric layer, a first work function layer, and a gap-filling material sequentially in the gate trench; and enlarging a volume of the gap-filling material in the gate trench.Type: ApplicationFiled: January 4, 2021Publication date: March 17, 2022Inventors: Chih-Hsiang Fan, Tsung-Han Shen, Jia-Ming Lin, Wei-Chin Lee, Hsien-Ming Lee, Chi On Chui
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Publication number: 20210175425Abstract: Provided are a method for forming a perovskite layer and a method for forming a structure comprising a perovskite layer. The method for forming a perovskite layer includes the following steps: coating a perovskite precursor material on a substrate; and performing a heating treatment to the substrate; and irradiating the perovskite precursor material with infrared light.Type: ApplicationFiled: December 10, 2019Publication date: June 10, 2021Applicant: Industrial Technology Research InstituteInventors: Shih-Hsiung Wu, Yung-Liang Tung, Kuo-Wei Huang, Pei-Ting Chiu, Hung-Ru Hsu, Jia-Ming Lin
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Patent number: 10957545Abstract: A method includes etching a dummy gate to form an opening. A gate dielectric layer is deposited in the opening. A blocking layer is deposited over the gate dielectric layer, wherein the blocking layer has a bottom portion over a bottom of the opening and a sidewall portion over a sidewall of the opening. An adhesive layer is deposited over the bottom portion of the blocking layer. A metal layer is deposited over the adhesive layer, wherein the metal layer is in contact with the sidewall portion of the blocking layer.Type: GrantFiled: November 30, 2018Date of Patent: March 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Ming Lin, Shiu-Ko Jangjian, Chun-Che Lin
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Publication number: 20210083048Abstract: A structure of a semiconductor device includes a substrate, an isolation structure, and a liner layer. The isolation structure is embedded in the substrate. The isolation structure has a bottom surface and a sidewall. The liner layer is between the substrate and the isolation. A first portion of the liner layer in contact with the sidewall of the isolation structure has a nitrogen concentration lower than a second portion of the liner layer in contact with the bottom surface of the isolation structure.Type: ApplicationFiled: November 30, 2020Publication date: March 18, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Ming LIN, Shiu-Ko JANGJIAN, Chun-Che LIN, Ying-Lang WANG, Wei-Ken LIN, Chuan-Pu LIU
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Patent number: 10861701Abstract: A semiconductor device includes a substrate, at least one layer, a metal adhesive, and a metal structure. The layer is disposed on the substrate. The layer has an opening, and the opening has a bottom surface and at least one sidewall. The metal adhesive is disposed on the bottom surface of the opening while leaving at least a portion of the sidewall of the opening exposed. The metal structure is disposed in the opening and on the metal adhesive.Type: GrantFiled: June 29, 2015Date of Patent: December 8, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Ming Lin, Shiu-Ko Jangjian, Chun-Che Lin
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Patent number: 10854713Abstract: A method includes forming a flowable dielectric layer in a trench of a substrate; curing the flowable dielectric layer; and annealing the cured flowable dielectric layer to form an insulation structure and a liner layer. The insulation structure is formed in the trench, the liner layer is formed between the insulation structure and the substrate, and the liner layer includes nitrogen.Type: GrantFiled: January 8, 2018Date of Patent: December 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Ming Lin, Shiu-Ko Jangjian, Chun-Che Lin, Ying-Lang Wang, Wei-Ken Lin, Chuan-Pu Liu
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Patent number: 10658252Abstract: A semiconductor structure with a stop layer for planarization process therein and a method for forming the same is disclosed. The method includes the steps of: forming a trench in a substrate and between active areas; filling the trench with isolation layer; doping the isolation layer with an element to form a doped isolation region; annealing the doped isolation region; and planarizing the annealed and doped isolation region and measuring a planarization depth thereof. The coefficients of thermal expansion (CTEs) of the stop layer, the dielectric layer, and the active area are different.Type: GrantFiled: April 22, 2019Date of Patent: May 19, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jia-Ming Lin, Wei-Ken Lin, Shiu-Ko JangJian, Chun-Che Lin