Patents by Inventor Jia-Rung Li

Jia-Rung Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Salicide process
    Publication number: 20070059878
    Abstract: A salicide process includes providing a substrate, in which the surface of the substrate contains at least a silicon layer; performing a degas process on the substrate; performing a cooling process on the substrate; depositing a metal layer over the surface of the substrate, in which the surface of the metal layer and the surface of the silicon layer are in contact with each other; and removing the unreacted metal layer.
    Type: Application
    Filed: September 14, 2005
    Publication date: March 15, 2007
    Inventors: Yu-Lan Chang, Chao-Ching Hsieh, Yi-Yiing Chiang, Yi-Wei Chen, Tzung-Yu Hung, Jia-Rung Li